スプール形サーボバルブを備えた空圧式除振装置に対するモデル追従制御の調整法とその効果(機械力学,計測,自動制御)

概要

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In the field of precision positioning and measurement, air-type anti-vibration apparatus are widely used. Nozzle flapper servo valve is commonly used for control of supplied air to air-type anti-vibration apparatus due to the linear characteristic of its valve. However, this valve always exhausts most of supplied air. Therefore the use of spool servo valve has been proposed. This valve little exhausts supplied air, however has non-linear characteristic. As compensation of the non-linear characteristic that this valve has, the model following control was proposed in the reference. The effectiveness of this control was shown in the paper, however the concrete adjustment method of this control is not clarified. This paper's object is to clarify the above problem.
2010-04-25