微動位置決め機構に対する運動モードに基づく位置決めの特徴

概要

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In order to realize high-speed positioning, we previously proposed acceleration feedback for a three-degrees-of-freedom fine-motion mechanism with piezo elements. Its superior performance was illustrated by the experimental results. In this experiment, a motional-mode-based decoupling control scheme was adopted. As is well known, the motional-mode selector and motional-mode distributor matrices, which are calculated using the displacement of both sensors and actuators, are inserted in to the decoupling control loop. However, it is difficult to determine these matrices uniquely. Thus, in this paper, a method to derive these matrices is presented which coincides with the initial condition of the compensator gain of an individual control system for comparison. In addition, the characteristics of motional-mode based positioning are shown in the experimental results.
一般社団法人日本機械学会の論文
1997-07-25