Etch-Back Planarization Technique for Multilevel Metallization

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1988-02-20

著者

• FUJIWARA Kozo

  Institute for Materials Research (IMR), Tohoku University

• Fujiwara Kazuo

  Kyoto Research Laboratory Matsushita Electronics Corporation

• Ueda Shigenori

  Department Of Material Physics Graduate School Of Engineering Science Osaka University

• Ueda Seiji

  Kyoto Research Laboratory Matsushita Electronics Corporation

• MAYUMI Shuichi

  Kyoto Research Laboratory, Matsushita Electronics Corporation

• NISHIDA Shuichi

  Memory Division, Matsushita Electronics Corporation

• INOUE Morio

  Kyoto Research Laboratory, Matsushita Electronics Corporation

• Inoue Morio

  Kyoto Research Laboratory Matsushita Electronics Corp.

• Inoue Morio

  Kyoto Research Laboratory Matsushita Electronics Corporation

• Ueda K

  Department Of Electrical And Computer Engineering Faculty Of Engineering Kanazawa University

• Mayumi S

  Kyoto Research Laboratory Matsushita Electronics Corporation

• Mayumi Shuichi

  Kyoto Research Laboratory Matsushita Electronics Corporation

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