Observation of Shrinkage Process by Annealing of Grown-in Defect in Cz-Si Crystal
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概要
- 論文の詳細を見る
- 2003-07-15
著者
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UEKI Takemi
NTT LSI Laboratories
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Ueki Takemi
NTT Electronics Corporation
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INOUE Naohisa
Research Institute for Advanced Science and Technology, Osaka Prefecture University
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Nakajima Shigeki
Department Of Electrical Engineering Faculty Of Science And Technology Kinki University
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Nakajima Sadanojo
Department Of Electrical And Electronic Engineering The University Of Tokushinna
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Itsumi M
Ntt Electronics Corp.
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Inoue Naohisa
Research Institute For Advanced Science And Technology Osaka Prefecture University
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Nakajima S
Ntt Electronics Corp.
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Komine Yukio
Ntt Microsystem Integration Labs. Ntt Corp.
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Nogiwa Seiji
Optical Measurement Technology Development Co. Ltd.:ando Electric Co. Ltd.
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NAKAJIMA Sigeru
NTT Electronics Corp.
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ITSUMI Manabu
NTT Electronics Corp.
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Inoue N
National Defense Acad. Yokosuka
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Ueki Takemi
Ntt Electronics Corp.
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