Electron-Cyclotron-Resonance Sputtered SrTiO_3 Thin Films

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1996-09-30

著者

• Itsumi M

  Ntt Electronics Corp.

• ITSUMI Manabu

  System Electronics Laboratories

• Akiya H

  Ntt System Electronics Laboratories

• OHFUJI Shin-ichi

  System Electronics Laboratories, NTT

• AKIYA Hideo

  System Electronics Laboratories, NTT

• Ohfuji S

  Ntt Lifestyle And Environmental Technol. Lab. Tokyo Jpn

関連論文

• Sodium Contamination in SiO_2 Films Induced by Plasma Ashing
• Shrinkage of Grown-in Defects in Czochralski Silicon During Thermal Annealing in Vacuum
• Observation of Shrinkage Process by Annealing of Grown-in Defect in Cz-Si Crystal
• Carbon in Grown-in Defects in Czoehralski Silicon and Its Influence on Gate-Oxide Defects
• Analysis of Side-Wall Structure of Grown-in Twin-Type Octahedral Defects in Czochralski Silicon
• Octahedral Void Structure Observed in Grown-In Defects in the Bulk of Standard Czochralski-Si for MOS LSIs
• Octahedral Void Structure Observed at the Grown-In Defects in the Bulk of Standard CZ-Si for MOSLSIs
• Dielectric Properties of Electron-Cyclotron-Resonance-Sputtered (Ba, Sr)TiO_3 Films
• Electron-Cyclotron-Resonance Sputtered SrTiO_3 Thin Films
• Four Types and Origins of Transient Si Wafer Deformation with Furnace Insertion and Withdrawal
• Decrease in Electrical Resistivity of W Films on GaAs Substrates after High-Temperature Annealing

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