Sodium Contamination in SiO_2 Films Induced by Plasma Ashing

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概要

著者

KOBAYASHI Kenji
Ibaraki Electrical Communication Laboratory, NTT Tokai
Saito Kazuyuki
Musashino Electrical Communication Laboratory Nippon Telegraph And Telephone Public Corporation
Saito Kazuyuki
Musashino Electrical Communication Laboratory N.t.t.
AKIYA Hideo
Musashino Electrical Communication Laboratory, Nippon Telegraph and Telephone Public Corporation
Akiya H
Ntt System Electronics Laboratories
Akiya Hideo
Musashino Electrical Communication Laboratory Nippon Telegraph And Telephone Public Corporation
Kobayashi Kenji
Ibaraki Electrical Communication Laboratory Nippon Telegraph And Telephone Public Corporation
Kobayashi Kenji
Ibaraki Electrical Communication Laboratory

関連論文

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