Analysis of Side-Wall Structure of Grown-in Twin-Type Octahedral Defects in Czochralski Silicon
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1998-04-15
著者
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Ueki Takemi
NTT Electronics Corporation
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Takeda Toshikazu
Murata Manufacturing Co. Ltd.
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Takeda T
Murata Manufacturing Co. Ltd.
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ITSUMI Manabu
System Electronics Laboratories
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TAKEDA Tadao
System Electronics Laboratories
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Ueki Takemi
Ntt Electronics Corp.
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ITSUMI Manabu
System Electronics Laboratories, NTT
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TAKEDA Tadao
System Electronics Laboratories, NTT
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