Shrinkage of Grown-in Defects in Czochralski Silicon During Thermal Annealing in Vacuum
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1998-07-01
著者
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Takaoka Akio
Research Center For Ultra-high Voltage Electron Microscopy Osaka University
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UEKI Takemi
NTT LSI Laboratories
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Ueki Takemi
NTT Electronics Corporation
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Takeda Toshikazu
Murata Manufacturing Co. Ltd.
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Takeda Takayuki
Department Of Electronic Engineering Aichi Institute Of Technology
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Takeda Tatsuoki
Department Of Thermonuclear Fusion Research Naka Fusion Estaklishment Japan Atomic Energy Research I
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Nakajima Shigeki
Department Of Electrical Engineering Faculty Of Science And Technology Kinki University
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Nakajima Sadanojo
Department Of Electrical And Electronic Engineering The University Of Tokushinna
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Itsumi M
Ntt Electronics Corp.
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Nakajima S
Ntt Electronics Corp.
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Takeda T
Murata Manufacturing Co. Ltd.
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Nogiwa Seiji
Optical Measurement Technology Development Co. Ltd.:ando Electric Co. Ltd.
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Takaoka Akio
Research Center For Uhvem Osaka Univ.
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ITSUMI Manabu
System Electronics Laboratories
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TAKEDA Tadao
System Electronics Laboratories
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YOSHIDA Kiyokazu
Research Center for UHVEM Osaka Univ.
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NAKAJIMA Sigeru
NTT Electronics Corp.
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Ueki Takemi
Ntt Electronics Corp.
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