Formation of Semi-Insulating Layers on Semiconducting β-Ga₂O₃ Single Crystals by Thermal Oxidation

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概要

• 論文の詳細を見る
• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文

著者

• Ohtomo Akira

  Department Of Applied Chemistry Tokyo Institute Of Technology

• Fujita Shizuo

  Photonics And Electronics Science And Engineering Center Kyoto University

• Oshima Takayoshi

  Department Of Electronic Science And Engineering Kyoto University

• Yamakoshi Shigenobu

  Tamura Co. Ltd.

• Masui Takekazu

  Koha Co. Ltd.

• Sasaki Kohei

  Tamura Co. Ltd.

• Kuramata Akito

  Tamura Co. Ltd.

• Kaminaga Kenichi

  Department of Applied Chemistry, Tokyo Institute of Technology, Meguro, Tokyo 152-8552, Japan

• Mukai Akira

  Department of Applied Chemistry, Tokyo Institute of Technology, Meguro, Tokyo 152-8552, Japan

• Oshima Takayoshi

  Department of Applied Chemistry, Tokyo Institute of Technology, Meguro, Tokyo 152-8552, Japan

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