Electrical Conductive Corundum-Structured α-GaO Thin Films on Sapphire with Tin-Doping Grown by Spray-Assisted Mist Chemical Vapor Deposition

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概要

• 論文の詳細を見る
• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文

著者

• Fujita Shizuo

  Photonics And Electronics Science And Engineering Center Kyoto University

• Akaiwa Kazuaki

  Department of Electronic Science and Engineering, Kyoto University, Kyoto 615-8510, Japan

関連論文

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• Fabrication of Highly Crystalline Corundum-Structured $\alpha$-(Ga1-xFex)2O3 Alloy Thin Films on Sapphire Substrates
• Photo-Leakage Current of Thin-Film Transistors with ZnO Channels Formed at Various Oxygen Partial Pressures under Visible Light Irradiation (Special Issue : Active-Matrix Flatpanel Displays and Devices : TFT Technologies and FPD Materials)
• Evaluation of Misfit Relaxation in α-GaO Epitaxial Growth on α-AlO Substrate
• Electrical Conductive Corundum-Structured α-GaO Thin Films on Sapphire with Tin-Doping Grown by Spray-Assisted Mist Chemical Vapor Deposition
• Fabrication of Silicon Oxide Thin Films by Mist Chemical Vapor Deposition Method from Polysilazane and Ozone as Sources
• Epitaxial ZnO Thin Films on $a$-Plane Sapphire Substrates Grown by Ultrasonic Spray-Assisted Mist Chemical Vapor Deposition
• Formation of Semi-Insulating Layers on Semiconducting \beta-Ga
• Formation of Semi-Insulating Layers on Semiconducting β-Ga₂O₃ Single Crystals by Thermal Oxidation

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