Growth of Narrow and Straight Germanium Nanowires by Vapor--Liquid--Solid Chemical Vapor Deposition
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概要
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This paper describes the growth of germanium nanowires (Ge NWs) via vapor--liquid--solid (VLS) mechanism by the low-pressure chemical vapor deposition (CVD) technique. A systematic study of the growth conditions of the Ge NWs has been conducted by varying the size of the Au nanoparticles and the substrate temperature. The tapering of the nanowires has been minimised when the growth temperature is lowered from 300 to 280 °C which also contributes to the decrease in the diameter of the Ge NWs. The growth temperature of 280 °C yields Ge NWs with diameters of less than 5 nm, offering an opportunity for the fabrication of high-performance germanium nanowire field-effect transistors.
- 2011-10-25
著者
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Uchida Ken
Department Of Biology Faculty Of Science Kumamoto University
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Oda Shunri
Quantum Nanoelectronics Research Center And Department Of Physical Electronics Tokyo Institute Of Technology
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Kodera Tetsuo
Quantum Nanoelectronics Research Center (QNERC), Tokyo Institute of Technology, Meguro, Tokyo 152-8550, Japan
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Usami Koichi
Quantum Nanoelectronics Research Center (QNERC), Tokyo Institute of Technology, Meguro, Tokyo 152-8550, Japan
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Simanullang Marolop
Quantum Nanoelectronics Research Center (QNERC), Tokyo Institute of Technology, Meguro, Tokyo 152-8550, Japan
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Oda Shunri
Quantum Nanoelectronics Research Center (QNERC), Tokyo Institute of Technology, Meguro, Tokyo 152-8550, Japan
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