Characteristics of Plasma Using a Ferromagnetic Enhanced Inductively Coupled Plasma Source
スポンサーリンク
概要
- 論文の詳細を見る
Plasma characteristics and electrical parameters of an internal linear inductively coupled plasma (ICP) source with a U-type antenna with/without a Ni–Zn ferromagnetic material installed near the antenna were investigated. The application of the ferromagnetic material to the antenna increased the plasma density, improved the plasma uniformity, lowered the antenna voltage, and increased the stability of the plasma during the operation. For the U-type ferromagnetic enhanced internal linear ICP source, a high density plasma on the order of $4.5\times 10^{11}$ cm-3 which is about three higher than that obtained for the source without the ferromagnetic material could be obtained at the pressure of 10 mTorr Ar and at the RF power of 600 W at 13.56 MHz.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2008-09-25
著者
-
Yeom Geun
Department Of Advanced Materials Science And Engineering Sungkyunkwan University
-
Park Jung
Department Electrical Engineering Busan National University
-
Lim Jong
Department of Advanced Materials Engineering, Sungkyunkwan University, Suwon, Gyunggi-do 440-746, Korea
-
Kim Kyong
Department of Advanced Materials Engineering, Sungkyunkwan University, Suwon, Gyunggi-do 440-746, Korea
-
Yeom Geun
Department of Advanced Materials Engineering, Sungkyunkwan University, Suwon, Gyunggi-do 440-746, Korea
-
Yeom Geun
Department of Advanced Materials Engineering, Sungkyunkwan University, Suwon, Gyeonggi 440-746, Republic Korea
-
Kim Kyong
Department of Advanced Materials Engineering, Sungkyunkwan University, Suwon, Gyeonggi 440-746, Republic Korea
関連論文
- Inhibitory Effects of Saururus chinensis (LOUR.) BAILL on the Development of Atopic Dermatitis-Like Skin Lesions in NC/Nga Mice(Pharmacology)
- Lack of Correlation Between QTc Dispersion and Morning Blood Pressure Surge in Recently Diagnosed Essential Hypertensive Patients
- No Association of Pro12Ala Polymorphism of PPAR-γ Gene With Coronary Artery Disease in Korean Subjects
- Relationship Between Serum Uric Acid Concentration and Insulin Resistance and Metabolic Syndrome
- Sex Difference in the Relationship Between Insulin Resistance and Corrected QT Interval in Non-Diabetic Subjects
- Direct Transport Measurements through an Ensemble of INAS Self-assembled Quantum Dots
- Fabrication and Characterization of Diamond-Like Carbon Coated Knife Edge Field Emitter Array
- Characteristics of Organic Light-Emitting Devices by the Surface Treatment of Indium Tin Oxide Surfaces Using Atmospheric Pressure Plasmas
- Effect of N_2O to C_4F_8/O_2 on Global Warming during Silicon Nitride Plasma Enhanced Chemical Vapor Deposition (PECVD) Chamber Cleaning Using a Remote Inductively Coupled Plasma Source : Nuclear Science, Plasmas, and Electric Discharges
- C_4F_8O/O_2/N-based Additive Gases for Silicon Nitride Plasma Enhanced Chemical Vapor Deposition Chamber Cleaning with Low Global Warming Potentials
- Spinal cholinergic mechanism of the relieving effects of electroacupuncture on cold and warm allodynia in a rat model of neuropathic pain
- Electroacupuncture Potentiates the Antiallodynic Effect of Intrathecal Neostigmine in a Rat Model of Neuropathic Pain
- Stress-Driven Formation of InGaAs Quantum Dots on GaAs with Sub-Micron Platinum Pattern
- Classification in Dynamic Contrast-enhanced Breast MRI : Comparison of Cluster-based approach and BI-RADS Criteria
- The Analgesic Effects of Automatically Controlled Rotating Acupuncture in Rats : Mediation by Endogenous Opioid System
- Protein Glycation Inhibitors from the Fruiting Body of Phellinus linteus(Pharmacognosy)
- High Efficiency White Organic Light-Emitting Diodes from One Emissive Layer
- Effect of Indium-Oxide Deposited Using an Oxygen Ion-Beam-Assisted-Deposition to Top-Emitting Organic Light-Emitting Diodes
- Effects of Oxypeucedanin on hKv1.5 and Action Potential Duration(Pharmacognosy)
- Serum Levels of Reproductive Hormones and Ultrasonographic Monitoring of Ovarian Follicles in Female Cloned Dogs
- Effects of 2-bromopropane on the female reproductive function in Sprague-Dawley rats.
- In vivoならびにIn vitroで成熟させた異なる生殖周期に採取した犬の卵母細胞中のグルタチオン濃度(臨床繁殖学)
- Effects of Tin Concentration on the Electrical Properties of Room-Temperature Ion-Beam-Assisted-Evaporation-Deposited Indium Oxide Thin Films : Surfaces, Interfaces, and Files
- A Case of Pretibial Mucinosis without Thyroid Disease
- Histo-topographic distribution of acute inflammation of the human umbilical cord
- Maximizing Total QoS-Provisioning of Image Streams with Limited Energy Budget
- Energy-Aware Error Correction for QoS-Provisioning Real-Time Communications in Wireless Networks
- Isoliquiritigenin Inhibits Tumor Growth and Protects the Kidney and Liver Against Chemotherapy-Induced Toxicity in a Mouse Xenograft Model of Colon Carcinoma
- Effects of the Licorice Extract against Tumor Growth and Cisplatin-Induced Toxicity in a Mouse Xenograft Model of Colon Cancer(Pharmacology)
- Analysis of Dielectric Recovery for SF_6 Gas-Blast Arc
- Bioartificial Liver Systems : Current Status and Future Perspective
- Enantioseparation of racemic N-acylarylalkylamines on various amino alcohol derived π-acidic chiral stationary phases
- Stevens-Johnson syndrome following occupational exposure to carbamate insecticide
- 20-P2-CJK18 Multidose Use of Heparin and Lidocaine Vials : a Study in Stability and Sterility
- Leptin and the metabolic syndrome in Korean adolescents : Factor analysis
- Clinical usefulness of 18F-FDG PET-CT for patients with gallbladder cancer and cholangiocarcinoma
- A Study of Sapphire Etching Characteristics Using BCl_3-based Inductively Coupled Plasmas
- Novel Green Small-molecule Host Materials for Solution-processed Organic Light-emitting Diodes
- Preparation and Characterization of Cyclodextrin Polymer and Its High-Performance Liquid-Chromatography Stationary Phase
- Design of Composite Hip Prostheses Considering the Long-Term Behavior of the Femur
- Implementation of computational methods to pattern recognition of movement behavior of Blattella germanica (Blattaria : Blattellidae) treated with Ca^ signal inducing chemicals
- Spinal Cord Infarction After Decompressive Laminectomy for Spontaneous Spinal Epidural Hematoma : Case Report
- Codoped Spacer Ratio Effect on Electroluminescence Characteristics of Hybrid White Organic Light-Emitting Diodes for Reduced Efficiency Roll-Off
- Cellulose Dimethylphenylcarbamate-bonded Carbon-clad Zirconia for Chiral Separation in High Performance Liquid Chromatography
- Dipolarity, Hydrogen-Bond Basicity and Hydrogen-Bond Acidity of Aqueous Poly(ethylene glycol)Solutions
- Effect of an Atmospheric Pressure Plasma Cleaning on the Outgassing Characteristics of MgO Layer for Plasma Display Panel
- Reversible Thermochromic Change of Molecular Architecture for a Diacetylene Derivative 10,12-Pentacosadiynoic Acid Self-assembled Thin Films on Ag Surfaces
- Various strategies for highly-efficient two-photon absorption in porphyrin arrays
- B106 EFFECT OF COAL TYPE ON GASIFICATION IN PRESSURIZED DROP TUBE FURNACE(Droplet/particle combustion-1)
- Ex Vivo Expansion of Human Umbilical Cord Blood CD34+ Cells in a Collagen Bead-Containing 3-Dimensional Culture System
- Alternative Splicing of Type II Procollagen Gene in the Dedifferentiation of Rat Epiphyseal Chondrocytes Serially Cultured in Monolayer
- Etching of Copper Films for Thin Film Transistor Liquid Crystal Display using Inductively Coupled Chlorine-Based Plasmas
- Plasma Characteristics of 450 mm Diameter Ferrite-Enhanced Inductively Coupled Plasma Source
- Biomedical Applications of Low Temperature Atmospheric Pressure Plasmas to Cancerous Cell Treatment and Tooth Bleaching
- Preparation of BiFeO3 Thin Films on SrRuO3/SrTiO3(001) Substrate by Dual Ion Beam Sputtering
- Color Stability and High Efficiency of White Phosphorescent Organic Light-Emitting Diodes with Suitable Position of Phosphorescent Red Emitter
- Hybrid White Organic Light-Emitting Diodes with Reduced Efficiency Roll-Off
- Ratio Effect of Codoped Spacer on Electroluminescent Characteristics of Hybrid White Organic Light-Emitting Diodes
- Highly Efficient Deep-Blue Phosphorescent Organic Light-Emitting Diodes Using Iridium(III) Bis[(5-cyano-4-fluorophenyl)pyridinato-N,C2’]picolinate as an Emitter
- Efficiency Enhancement and Color Stabilization in Organic Light-Emitting Devices Utilizing a Fullerene–Polymer Composite Layer Acting as a Hole Transport Layer
- Effect of the Thickness of the Lithium Quinolate and Aluminum Mixed Layer Acting as an Electron Injection Layer on the Efficiency of Organic Light-Emitting Devices
- Gas Chromatographic Characterization of Silica-Based Reversed-Phase Sorbents for Solid Phase Extraction
- Multi-Podands. Ag(I) Complexation with Mono - to Quadru-Podands Having Sulfur Donor
- A Correlation between Antioxidant Activity and Metabolite Release during the Blanching of Chrysanthemum coronarium L.
- Inverse Dynamic Analysis of Constrained Multibody Systems Considering Friction Forces Acting on Kinematic Joints
- Genetic Variability and Differentiation within and between the Stone Flounder (Kareius bicoloratus) and the Starry Flounder (Platichthys stellatus)
- Sensitive Fern (Onoclea sensibilis) Extract Suppresses Proliferation and Migration of Vascular Smooth Muscle Cells Inflamed by Neighboring Macrophages
- The effect of ketamine on tracheal intubating conditions without neuromuscular blockade during sevoflurane induction in children
- SLA-Based Scheduling of Bag-of-Tasks Applications on Power-Aware Cluster Systems
- Modified Kinetic Model for Dichloropropanol Synthesis from Glycerin and Anhydrous HCl at High Pressure
- Plasma Characteristics of Large Area Inductively Coupled Plasma System Using Ferrite-Module-Enhanced U-Type Antenna
- Low-Voltage, Simple-Structure, High-Efficiency p–i–n-Type Electrophosphorescent Blue Organic Light-Emitting Diodes
- Characteristics of Pentacene Organic Field-Effect Transistors with Self-Assembled-Monolayer-Treated HfO2 Gate Oxide
- Effect of DC Bias Voltage on the Characteristics of Low Temperature Silicon–Nitride Films Deposited by Internal Linear Antenna Inductively Coupled Plasma Source
- Radiofrequency Lesioning on Dorsal Root Ganglion for Persistent Low Back/Leg Pain Following Operations : Long term outcome
- Characteristics of Silicon Carbide Etching Using Magnetized Inductively Coupled Plasma
- Characteristics of Internal Inductively Coupled Plasma Source for Ultralarge-Area Plasma Processing
- Effect of Antenna Diameter on the Characteristics of Internal-Type Linear Inductively Coupled Plasma
- Characteristics of Parallel Internal-Type Inductively Coupled Plasmas for Large Area Flat Panel Display Processing
- Fast Pyrolysis of Biomasses in a Bubbling Fluidized Bed Reactor
- The Ideal Doping Concentration in Phosphorescent Organic Light Emitting Devices
- Characteristics of a Multilayer SiOx(CH)yNz Film Deposited by Low Temperature Plasma Enhanced Chemical Vapor Deposition Using Hexamethyldisilazane/Ar/N2O
- Deposition of SiO2 by Plasma Enhanced Chemical Vapor Deposition as the Diffusion Barrier to Polymer Substrates
- Study on the O2 Plasma Treatment of Indium Tin Oxide for Organic Light Emitting Diodes Using Inductively Coupled Plasma
- Characteristics of Plasma Using a Ferromagnetic Enhanced Inductively Coupled Plasma Source
- Characteristics of Inductively Coupled Plasma using Internal Double Comb-type Antenna for Flat Panel Display Processing
- Novel Internal Linear Inductively Coupled Plasma Source for Flat Panel Display Applications
- InAs/GaAs Quantum-Dot Laser Diode Lasing at 1.3 μm With Triple-Stacked-Layer Dots-in-a-Well Structure Grown by Atomic Layer Epitaxy
- Characteristics of Large Area Inductively Coupled Plasma Using a Multiple Linear Antennas with U-Type Parallel Connection for Flat Panel Display Processing
- Plasma Characteristics of Inductively Coupled Plasma Using Dual-Frequency Antennas
- Selective Etching of Magnetic Tunnel Junction Materials Using CO/NH
- E2-7 Work-Exacerbated Asthma in the Korean Population : Prevalence and Characteristics Based on a Questionnaire Survey(English Session 2)
- Effect of an Atmospheric Pressure Plasma Cleaning on the Outgassing Characteristics of MgO Layer for Plasma Display Panel
- Selective Etching of Magnetic Tunnel Junction Materials Using CO/NH₃ Gas Mixture in Radio Frequency Pulse-Biased Inductively Coupled Plasmas (Special Issue : Dry Process)
- An Optimal Resource Sharing in Hierarchical Virtual Organizations in the Grid
- A comparative study of FDG PET/CT and enhanced multi-detector CT for detecting liver metastasis according to the size and location