Characteristics of Internal Inductively Coupled Plasma Source for Ultralarge-Area Plasma Processing
スポンサーリンク
概要
- 論文の詳細を見る
The capacitive–inductive (E–H) mode transition characteristics of an ultralarge-area ($2{,}750\times 2{,}350$ mm2) inductively coupled plasma (ICP) system with multiple internal U-type antennas have been investigated. When the electrical characteristics of the ICP antenna such as power transfer efficiency and ICP source impedance, were measured as a function of ICP power, a distinctive change from E to H mode was identified at an rf power of approximately 3 kW. When the power transfer mode was changed from capacitive to inductive for the multiple U-type antenna configuration, better plasma uniformity was obtained owing to the more uniform power deposition along the antenna line.
- 2010-03-25
著者
-
Hong Seung
Department Of Biological Sciences Dankook University
-
Lim Jong
Department Of Advanced Materials Science And Engineering Sungkyunkwan University
-
Geun Young
Department of Advanced Materials Engineering, Sungkyunkwan University, Suwon 440-746, Korea
-
Geun Young
Department of Materials Science and Engineering, Sungkyunkwan University, Suwon, Kyunggi-do 440-746, Korea
-
Gweon Gwang
Department of Materials Science and Engineering, Sungkyunkwan University, Suwon, Kyunggi-do 440-746, Korea
-
Jong Hyeuk
Department of Materials Science and Engineering, Sungkyunkwan University, Suwon, Kyunggi-do 440-746, Korea
-
Kyong Nam
Department of Materials Science and Engineering, Sungkyunkwan University, Suwon, Kyunggi-do 440-746, Korea
-
Yi Yeon
Department of Materials Science and Engineering, Sungkyunkwan University, Suwon, Kyunggi-do 440-746, Korea
-
Lim Jong
Department of Advanced Materials Engineering, Sungkyunkwan University, Suwon, Gyunggi-do 440-746, Korea
-
Seung Pyo
Department of Materials Science and Engineering, Sungkyunkwan University, Suwon, Kyunggi-do 440-746, Korea
-
Gwang Ho
Department of Materials Science and Engineering, Sungkyunkwan University, Suwon, Kyunggi-do 440-746, Korea
関連論文
- Characteristics of Organic Light-Emitting Devices by the Surface Treatment of Indium Tin Oxide Surfaces Using Atmospheric Pressure Plasmas
- The Infrared Astronomical Mission AKARI
- Effect of glass powders with spherical shape and fine size on the sintering behavior and dielectric properties of BaTiO_3 ceramics
- Characteristics of nano-sized pb-based glass powders by high temperature spray pyrolysis method
- Effects of solvent on the properties of nano-sized glass powders prepared by flame spray pyrolysis
- Nano-sized LaMnO_3 powders prepared by spray pyrolysis from spray solution containing citric acid
- 噴霧火炎法によるEu添加BaMgAl_O_蛍光体中実球状粒子の合成
- 二種類の噴霧発生器を用いた噴霧熱分解によるコバルト微粉末の合成
- 二種類の噴霧発生器を用いた噴霧熱分解による酸化コバルト微粉末の合成
- AKARI Detection of the Infrared-Bright Supernova Remnant B0104-72.3 in the Small Magellanic Cloud
- Stress-Driven Formation of InGaAs Quantum Dots on GaAs with Sub-Micron Platinum Pattern
- High Efficiency White Organic Light-Emitting Diodes from One Emissive Layer
- Effect of Indium-Oxide Deposited Using an Oxygen Ion-Beam-Assisted-Deposition to Top-Emitting Organic Light-Emitting Diodes
- (CeTb)MgAl_O_ Phosphor Particles Prepared by Spray Pyrolysis from Spray Solution Containing Citric Acid and Ethylene Glycol
- Evidence of a Novel Dipeptidyl Aminopeptidase in Mammalian GH_3 Cells: New Insights into the Processing of Peptide Hormone Precursors
- Immunocytochemical Analysis of Peptide Hormone Processing: Importance of the Positively Charged N-terminal Domain of Signal Peptide in Correct ER Targeting in Yeast Cells
- Topogenic Effect of Positively Charged N-terminal Amino Acid in ER Translocation of Yeast α-Factor Precursor
- Simultaneous effect of ursolic acid and oleanolic acid on epidermal permeability barrier function and epidermal keratinocyte differentiation via peroxisome proliferator-activated receptor-α
- Regional Cerebral Hyperperfusion with Ictal Dystonic Posturing : Ictal-Interictal SPECT Subtraction
- Stevens-Johnson syndrome following occupational exposure to carbamate insecticide
- IV B14 Epilepsy surgery in dysembryoplastic neuroepithelial tumor
- Dysembryoplastic neuroepithelial tumors in pediatric patients
- Contralateral EEG Slowing and Amobarbital Distribution in Wada Test: An Intracarotid SPECT Study
- White-Matter Change in Mesial Temporal Sclerosis : Correlation of MRI with PET, Pathology, and Clinical Features
- Two novel mutations in the EPM2A gene in a Korean patient with Lafora's progressive myoclonus epilepsy
- Modified Kinetic Model for Dichloropropanol Synthesis from Glycerin And Anhydrous Hcl at High Pressure
- Effects of a multilamellar emulsion on glucocorticoid-induced epidermal atrophy and barrier impairment
- Design of Composite Hip Prostheses Considering the Long-Term Behavior of the Femur
- Global Asymptotic Stabilization of a Class of Nonlinear Time-Delay Systems by Output Feedback(Systems and Control)
- Reversible Thermochromic Change of Molecular Architecture for a Diacetylene Derivative 10,12-Pentacosadiynoic Acid Self-assembled Thin Films on Ag Surfaces
- Various strategies for highly-efficient two-photon absorption in porphyrin arrays
- Ex Vivo Expansion of Human Umbilical Cord Blood CD34+ Cells in a Collagen Bead-Containing 3-Dimensional Culture System
- Plasma Characteristics of 450 mm Diameter Ferrite-Enhanced Inductively Coupled Plasma Source
- Y-chromosome STR haplotype profiling in the Mongolian population
- Effect of Boric Acid Flux and Drying Control Chemical Additive on the Characteristics of Y2O3:Eu Phosphor Particles Prepared by Spray Pyrolysis
- Morphology Control of Gd2O3:Eu Phosphor Particles with Cubic and Monoclinic Phases Prepared by High-Temperature Spray Pyrolysis
- Luminescence Characteristics of Eu-Doped Calcium Magnesium Chlorosilicate Phosphor Particles Prepared by Spray Pyrolysis
- Direct Synthesis of High-Brightness (CeTb)MgAl11O19 Phosphor Particles by Spray Pyrolysis with Boric Acid Flux
- Modified Kinetic Model for Dichloropropanol Synthesis from Glycerin and Anhydrous HCl at High Pressure
- Plasma Characteristics of Large Area Inductively Coupled Plasma System Using Ferrite-Module-Enhanced U-Type Antenna
- Effect of DC Bias Voltage on the Characteristics of Low Temperature Silicon–Nitride Films Deposited by Internal Linear Antenna Inductively Coupled Plasma Source
- Effect of Post Annealing of ZnO Buffer Layer on the Properties of Hydrothermally Grown ZnO Nanorods
- Characteristics of Internal Inductively Coupled Plasma Source for Ultralarge-Area Plasma Processing
- Effect of Antenna Diameter on the Characteristics of Internal-Type Linear Inductively Coupled Plasma
- Fast Pyrolysis of Biomasses in a Bubbling Fluidized Bed Reactor
- Characteristics of a Multilayer SiOx(CH)yNz Film Deposited by Low Temperature Plasma Enhanced Chemical Vapor Deposition Using Hexamethyldisilazane/Ar/N2O
- Deposition of SiO2 by Plasma Enhanced Chemical Vapor Deposition as the Diffusion Barrier to Polymer Substrates
- Study on the O2 Plasma Treatment of Indium Tin Oxide for Organic Light Emitting Diodes Using Inductively Coupled Plasma
- Characteristics of Plasma Using a Ferromagnetic Enhanced Inductively Coupled Plasma Source
- Characteristics of Inductively Coupled Plasma using Internal Double Comb-type Antenna for Flat Panel Display Processing
- Effects of Y/Gd Ratio and Boron Excess on Vacuum Ultraviolet Characteristics and Morphology of (Y,Gd)BO3:Eu Phosphor Particles Prepared by Spray Pyrolysis
- Variant of phacomatosis pigmentokeratotica