Effect of Antenna Diameter on the Characteristics of Internal-Type Linear Inductively Coupled Plasma
スポンサーリンク
概要
- 論文の詳細を見る
In this study, the antenna characteristics of an internal-type, linear, inductively coupled plasma (ICP) source were varied by changing the inner conductor diameter of the ICP antenna composed of an inner conductor enclosed by outer dielectric tubing. The effect of the varied antenna characteristics on the plasma characteristics and the electrical characteristics of the large area plasma source with a substrate area of $2300\times 2000$ mm2 were investigated. The decrease of the antenna conductor diameter from 25 to 10 mm decreased the capacitance of the antenna between the conductor and the dielectric tubing, increased the plasma density, decreased the plasma potential at the same rf power, and improved the plasma uniformity. The increased plasma density and the decreased plasma potential obtained with the smaller antenna conductor diameter were attributed to the increased power transfer efficiency caused by the increased inductive coupling at the same rf power.
- 2009-09-25
著者
-
Hong Seung
Department Of Biological Sciences Dankook University
-
Yeom Geun
Department Of Advanced Materials Science And Engineering Sungkyunkwan University
-
Gweon Gwang
Department of Materials Science and Engineering, Sungkyunkwan University, Suwon, Kyunggi-do 440-746, Korea
-
Lim Jong
Department of Materials Science and Engineering, Sungkyunkwan University, Suwon, Kyunggi-do 440-746, Korea
-
Lim Jong
Department of Advanced Materials Engineering, Sungkyunkwan University, Suwon, Gyunggi-do 440-746, Korea
-
Kim Kyong
Department of Materials Science and Engineering, Sungkyunkwan University, Suwon, Kyunggi-do 440-746, Korea
-
Kim Kyong
Department of Advanced Materials Engineering, Sungkyunkwan University, Suwon, Gyunggi-do 440-746, Korea
-
Hong Seung
Department of Materials Science and Engineering, Sungkyunkwan University, Suwon, Kyunggi-do 440-746, Korea
-
Yeom Geun
Department of Advanced Materials Engineering, Sungkyunkwan University, Suwon, Gyunggi-do 440-746, Korea
-
Yeom Geun
Department of Materials Science and Engineering, Sungkyunkwan University, Suwon, Kyunggi-do 440-746, Korea
-
Yeom Geun
Department of Advanced Materials Engineering, Sungkyunkwan University, Suwon, Gyeonggi 440-746, Republic Korea
-
Kim Kyong
Department of Advanced Materials Engineering, Sungkyunkwan University, Suwon, Gyeonggi 440-746, Republic Korea
関連論文
- Characteristics of Organic Light-Emitting Devices by the Surface Treatment of Indium Tin Oxide Surfaces Using Atmospheric Pressure Plasmas
- The Infrared Astronomical Mission AKARI
- Effect of glass powders with spherical shape and fine size on the sintering behavior and dielectric properties of BaTiO_3 ceramics
- Characteristics of nano-sized pb-based glass powders by high temperature spray pyrolysis method
- Effects of solvent on the properties of nano-sized glass powders prepared by flame spray pyrolysis
- Nano-sized LaMnO_3 powders prepared by spray pyrolysis from spray solution containing citric acid
- 噴霧火炎法によるEu添加BaMgAl_O_蛍光体中実球状粒子の合成
- 二種類の噴霧発生器を用いた噴霧熱分解によるコバルト微粉末の合成
- 二種類の噴霧発生器を用いた噴霧熱分解による酸化コバルト微粉末の合成
- Effect of N_2O to C_4F_8/O_2 on Global Warming during Silicon Nitride Plasma Enhanced Chemical Vapor Deposition (PECVD) Chamber Cleaning Using a Remote Inductively Coupled Plasma Source : Nuclear Science, Plasmas, and Electric Discharges
- C_4F_8O/O_2/N-based Additive Gases for Silicon Nitride Plasma Enhanced Chemical Vapor Deposition Chamber Cleaning with Low Global Warming Potentials
- AKARI Detection of the Infrared-Bright Supernova Remnant B0104-72.3 in the Small Magellanic Cloud
- Stress-Driven Formation of InGaAs Quantum Dots on GaAs with Sub-Micron Platinum Pattern
- High Efficiency White Organic Light-Emitting Diodes from One Emissive Layer
- Effect of Indium-Oxide Deposited Using an Oxygen Ion-Beam-Assisted-Deposition to Top-Emitting Organic Light-Emitting Diodes
- (CeTb)MgAl_O_ Phosphor Particles Prepared by Spray Pyrolysis from Spray Solution Containing Citric Acid and Ethylene Glycol
- Evidence of a Novel Dipeptidyl Aminopeptidase in Mammalian GH_3 Cells: New Insights into the Processing of Peptide Hormone Precursors
- Immunocytochemical Analysis of Peptide Hormone Processing: Importance of the Positively Charged N-terminal Domain of Signal Peptide in Correct ER Targeting in Yeast Cells
- Topogenic Effect of Positively Charged N-terminal Amino Acid in ER Translocation of Yeast α-Factor Precursor
- Effects of Tin Concentration on the Electrical Properties of Room-Temperature Ion-Beam-Assisted-Evaporation-Deposited Indium Oxide Thin Films : Surfaces, Interfaces, and Files
- Simultaneous effect of ursolic acid and oleanolic acid on epidermal permeability barrier function and epidermal keratinocyte differentiation via peroxisome proliferator-activated receptor-α
- A Case of Pretibial Mucinosis without Thyroid Disease
- Maximizing Total QoS-Provisioning of Image Streams with Limited Energy Budget
- Energy-Aware Error Correction for QoS-Provisioning Real-Time Communications in Wireless Networks
- Regional Cerebral Hyperperfusion with Ictal Dystonic Posturing : Ictal-Interictal SPECT Subtraction
- Stevens-Johnson syndrome following occupational exposure to carbamate insecticide
- IV B14 Epilepsy surgery in dysembryoplastic neuroepithelial tumor
- Dysembryoplastic neuroepithelial tumors in pediatric patients
- Contralateral EEG Slowing and Amobarbital Distribution in Wada Test: An Intracarotid SPECT Study
- White-Matter Change in Mesial Temporal Sclerosis : Correlation of MRI with PET, Pathology, and Clinical Features
- A Study of Sapphire Etching Characteristics Using BCl_3-based Inductively Coupled Plasmas
- Two novel mutations in the EPM2A gene in a Korean patient with Lafora's progressive myoclonus epilepsy
- Effects of a multilamellar emulsion on glucocorticoid-induced epidermal atrophy and barrier impairment
- Design of Composite Hip Prostheses Considering the Long-Term Behavior of the Femur
- Implementation of computational methods to pattern recognition of movement behavior of Blattella germanica (Blattaria : Blattellidae) treated with Ca^ signal inducing chemicals
- Effect of an Atmospheric Pressure Plasma Cleaning on the Outgassing Characteristics of MgO Layer for Plasma Display Panel
- Reversible Thermochromic Change of Molecular Architecture for a Diacetylene Derivative 10,12-Pentacosadiynoic Acid Self-assembled Thin Films on Ag Surfaces
- Various strategies for highly-efficient two-photon absorption in porphyrin arrays
- Ex Vivo Expansion of Human Umbilical Cord Blood CD34+ Cells in a Collagen Bead-Containing 3-Dimensional Culture System
- Etching of Copper Films for Thin Film Transistor Liquid Crystal Display using Inductively Coupled Chlorine-Based Plasmas
- Plasma Characteristics of 450 mm Diameter Ferrite-Enhanced Inductively Coupled Plasma Source
- Y-chromosome STR haplotype profiling in the Mongolian population
- Biomedical Applications of Low Temperature Atmospheric Pressure Plasmas to Cancerous Cell Treatment and Tooth Bleaching
- Effect of Boric Acid Flux and Drying Control Chemical Additive on the Characteristics of Y2O3:Eu Phosphor Particles Prepared by Spray Pyrolysis
- Morphology Control of Gd2O3:Eu Phosphor Particles with Cubic and Monoclinic Phases Prepared by High-Temperature Spray Pyrolysis
- Luminescence Characteristics of Eu-Doped Calcium Magnesium Chlorosilicate Phosphor Particles Prepared by Spray Pyrolysis
- Direct Synthesis of High-Brightness (CeTb)MgAl11O19 Phosphor Particles by Spray Pyrolysis with Boric Acid Flux
- The effect of ketamine on tracheal intubating conditions without neuromuscular blockade during sevoflurane induction in children
- SLA-Based Scheduling of Bag-of-Tasks Applications on Power-Aware Cluster Systems
- Modified Kinetic Model for Dichloropropanol Synthesis from Glycerin and Anhydrous HCl at High Pressure
- Plasma Characteristics of Large Area Inductively Coupled Plasma System Using Ferrite-Module-Enhanced U-Type Antenna
- Effect of DC Bias Voltage on the Characteristics of Low Temperature Silicon–Nitride Films Deposited by Internal Linear Antenna Inductively Coupled Plasma Source
- Effect of Post Annealing of ZnO Buffer Layer on the Properties of Hydrothermally Grown ZnO Nanorods
- Characteristics of Silicon Carbide Etching Using Magnetized Inductively Coupled Plasma
- Characteristics of Internal Inductively Coupled Plasma Source for Ultralarge-Area Plasma Processing
- Effect of Antenna Diameter on the Characteristics of Internal-Type Linear Inductively Coupled Plasma
- Characteristics of Parallel Internal-Type Inductively Coupled Plasmas for Large Area Flat Panel Display Processing
- Fast Pyrolysis of Biomasses in a Bubbling Fluidized Bed Reactor
- Characteristics of a Multilayer SiOx(CH)yNz Film Deposited by Low Temperature Plasma Enhanced Chemical Vapor Deposition Using Hexamethyldisilazane/Ar/N2O
- Deposition of SiO2 by Plasma Enhanced Chemical Vapor Deposition as the Diffusion Barrier to Polymer Substrates
- Study on the O2 Plasma Treatment of Indium Tin Oxide for Organic Light Emitting Diodes Using Inductively Coupled Plasma
- Characteristics of Plasma Using a Ferromagnetic Enhanced Inductively Coupled Plasma Source
- Characteristics of Inductively Coupled Plasma using Internal Double Comb-type Antenna for Flat Panel Display Processing
- Novel Internal Linear Inductively Coupled Plasma Source for Flat Panel Display Applications
- Characteristics of Large Area Inductively Coupled Plasma Using a Multiple Linear Antennas with U-Type Parallel Connection for Flat Panel Display Processing
- Plasma Characteristics of Inductively Coupled Plasma Using Dual-Frequency Antennas
- Selective Etching of Magnetic Tunnel Junction Materials Using CO/NH
- Effects of Y/Gd Ratio and Boron Excess on Vacuum Ultraviolet Characteristics and Morphology of (Y,Gd)BO3:Eu Phosphor Particles Prepared by Spray Pyrolysis
- Effect of an Atmospheric Pressure Plasma Cleaning on the Outgassing Characteristics of MgO Layer for Plasma Display Panel
- Selective Etching of Magnetic Tunnel Junction Materials Using CO/NH₃ Gas Mixture in Radio Frequency Pulse-Biased Inductively Coupled Plasmas (Special Issue : Dry Process)
- An Optimal Resource Sharing in Hierarchical Virtual Organizations in the Grid
- Variant of phacomatosis pigmentokeratotica