Characteristics of Inductively Coupled Plasma using Internal Double Comb-type Antenna for Flat Panel Display Processing
スポンサーリンク
概要
- 論文の詳細を見る
This study examined the electrical and plasma properties of an internal linear inductive antenna for flat panel display processing. An internal linear antenna, which is referred to as a "double comb-type antenna", with a substrate area of $2{,}300\times 2{,}000$ mm2 was used as a large-area inductively coupled plasma (ICP) source. This extremely large area ICP source showed a transition from E-mode to H-mode near 3 kW. At 9 kW, a power transfer efficiency of approximately 81% was obtained. The plasma uniformity measured by a Langmuir probe was approximately 14% over the substrate area at 15 mTorr Ar and 5 kW of RF power.
- Japan Society of Applied Physicsの論文
- 2007-12-25
著者
-
Park Jae
Department Of Applied Bioscience And Biotechnology Faculty Of Life And Environmental Science
-
Yeom Geun
Department Of Advanced Materials Science And Engineering Sungkyunkwan University
-
Park Jung
Department Electrical Engineering Busan National University
-
Lim Jong
Department of Advanced Materials Science and Engineering, Sungkyunkwan University, Suwon, Kyunggi-do 440-746, South Korea
-
Lim Jong
Department of Advanced Materials Engineering, Sungkyunkwan University, Suwon, Gyunggi-do 440-746, Korea
-
Kim Kyong
Department of Advanced Materials Science and Engineering, Sungkyunkwan University, Suwon, Kyunggi-do 440-746, South Korea
-
Kim Kyong
Department of Advanced Materials Engineering, Sungkyunkwan University, Suwon, Gyunggi-do 440-746, Korea
-
Park Jae
Department of Advanced Materials Science and Engineering, Sungkyunkwan University, Suwon, Kyunggi-do 440-746, South Korea
-
Yeom Geun
Department of Advanced Materials Engineering, Sungkyunkwan University, Suwon, Gyunggi-do 440-746, Korea
-
Park Jung
Department of Advanced Materials Science and Engineering, Sungkyunkwan University, Suwon, Kyunggi-do 440-746, South Korea
-
Yeom Geun
Department of Advanced Materials Engineering, Sungkyunkwan University, Suwon, Gyeonggi 440-746, Republic Korea
-
Kim Kyong
Department of Advanced Materials Engineering, Sungkyunkwan University, Suwon, Gyeonggi 440-746, Republic Korea
関連論文
- 1,2,3,4,6-Penta-O-galloyl-β-D-glucose Protects Splenocytes against Radiation-Induced Apoptosis in Murine Splenocytes
- Inhibitory Effects of Saururus chinensis (LOUR.) BAILL on the Development of Atopic Dermatitis-Like Skin Lesions in NC/Nga Mice(Pharmacology)
- Lack of Correlation Between QTc Dispersion and Morning Blood Pressure Surge in Recently Diagnosed Essential Hypertensive Patients
- No Association of Pro12Ala Polymorphism of PPAR-γ Gene With Coronary Artery Disease in Korean Subjects
- Relationship Between Serum Uric Acid Concentration and Insulin Resistance and Metabolic Syndrome
- Sex Difference in the Relationship Between Insulin Resistance and Corrected QT Interval in Non-Diabetic Subjects
- Direct Transport Measurements through an Ensemble of INAS Self-assembled Quantum Dots
- Fabrication and Characterization of Diamond-Like Carbon Coated Knife Edge Field Emitter Array
- Characteristics of Organic Light-Emitting Devices by the Surface Treatment of Indium Tin Oxide Surfaces Using Atmospheric Pressure Plasmas
- Effect of N_2O to C_4F_8/O_2 on Global Warming during Silicon Nitride Plasma Enhanced Chemical Vapor Deposition (PECVD) Chamber Cleaning Using a Remote Inductively Coupled Plasma Source : Nuclear Science, Plasmas, and Electric Discharges
- C_4F_8O/O_2/N-based Additive Gases for Silicon Nitride Plasma Enhanced Chemical Vapor Deposition Chamber Cleaning with Low Global Warming Potentials
- Spinal cholinergic mechanism of the relieving effects of electroacupuncture on cold and warm allodynia in a rat model of neuropathic pain
- Electroacupuncture Potentiates the Antiallodynic Effect of Intrathecal Neostigmine in a Rat Model of Neuropathic Pain
- Classification in Dynamic Contrast-enhanced Breast MRI : Comparison of Cluster-based approach and BI-RADS Criteria
- The Analgesic Effects of Automatically Controlled Rotating Acupuncture in Rats : Mediation by Endogenous Opioid System
- The Role of Hyaluronic Acid, Chitosan, and Calcium Sulfate and Their Combined Effect on Early Bony Consolidation in Distraction Osteogenesis of a Canine Model
- Clinical Application of Injectable Calcium Sulfate on Early Bony Consolidation in Distraction Osteogenesis for the Treatment of Craniofacial Microsomia
- Early Revascularization of Membranous Inlay Bone Graft in Canine Mandible Model
- 同側の腎形成不全と子宮角の分節性発育不全を示した猫の1例(外科学)
- Protein Glycation Inhibitors from the Fruiting Body of Phellinus linteus(Pharmacognosy)
- High Efficiency White Organic Light-Emitting Diodes from One Emissive Layer
- Effect of Indium-Oxide Deposited Using an Oxygen Ion-Beam-Assisted-Deposition to Top-Emitting Organic Light-Emitting Diodes
- Effects of Oxypeucedanin on hKv1.5 and Action Potential Duration(Pharmacognosy)
- Serum Levels of Reproductive Hormones and Ultrasonographic Monitoring of Ovarian Follicles in Female Cloned Dogs
- Correlation between serum CEA level and metabolic volume as determined by FDG PET in postoperative patients with recurrent colorectal cancer
- Comparison of Low vs Moderate Dose of Atorvastatin in Clopidogrel Resistance After Coronary Stenting in Korean Patients With Acute Coronary Syndrome
- Protective Effect of Triphlorethol-A from Ecklonia cava against Ionizing Radiation in vitro
- Effects of 2-bromopropane on the female reproductive function in Sprague-Dawley rats.
- Telomere length and the risk of lung cancer
- Comprehensive assessment of P21 polymorphisms and lung cancer risk
- Study on the Ophthalmic Diseases in ICR Mice and BALB/c Mice
- Spontaneous Ophthalmic Diseases in 586 New Zealand White Rabbits
- A Game Theoretic Power Control Algorithm with Sequential Subchannel Nulling for Wireless Networks
- In vivoならびにIn vitroで成熟させた異なる生殖周期に採取した犬の卵母細胞中のグルタチオン濃度(臨床繁殖学)
- Effects of Tin Concentration on the Electrical Properties of Room-Temperature Ion-Beam-Assisted-Evaporation-Deposited Indium Oxide Thin Films : Surfaces, Interfaces, and Files
- International evaluation of bovine corneal opacity and permeability assay as an alternative method to eye irritant test
- Reversal of Medetomidine-Ketamine Combination Anesthesia in Rabbits by Atipamezole
- Histo-topographic distribution of acute inflammation of the human umbilical cord
- The Theory of Direct Nuclear Knock-out Reactions
- Isoliquiritigenin Inhibits Tumor Growth and Protects the Kidney and Liver Against Chemotherapy-Induced Toxicity in a Mouse Xenograft Model of Colon Carcinoma
- Effects of the Licorice Extract against Tumor Growth and Cisplatin-Induced Toxicity in a Mouse Xenograft Model of Colon Cancer(Pharmacology)
- Analysis of Dielectric Recovery for SF_6 Gas-Blast Arc
- Bioartificial Liver Systems : Current Status and Future Perspective
- Enantioseparation of racemic N-acylarylalkylamines on various amino alcohol derived π-acidic chiral stationary phases
- Purification, Characterization and Gene Analysis of N-Acetylglucosaminidase from Enterobacter sp. G-1
- Molecular Cloning, Nucleotide Sequencing, and Regulation of the chiA Gene Encoding One of Chitinases from Enterobacter sp. G-1
- Purification and Characterization of the Chitinase (ChiA) from Enterobacter sp. G-1
- Noonan Syndrome : A Case Report
- 20-P2-CJK18 Multidose Use of Heparin and Lidocaine Vials : a Study in Stability and Sterility
- Leptin and the metabolic syndrome in Korean adolescents : Factor analysis
- Infrequent hypermethylation of the PTEN gene in Korean non-small-cell lung cancers
- Clinical usefulness of 18F-FDG PET-CT for patients with gallbladder cancer and cholangiocarcinoma
- DP-010-1 HCC in living donor liver transplantation : Do we need further modifications with the Milan criteria?
- Hypomethylation of the protein gene product 9.5 promoter region in gallbladder cancer and its relationship with clinicopathological features
- A Study of Sapphire Etching Characteristics Using BCl_3-based Inductively Coupled Plasmas
- Novel Green Small-molecule Host Materials for Solution-processed Organic Light-emitting Diodes
- Preparation and Characterization of Cyclodextrin Polymer and Its High-Performance Liquid-Chromatography Stationary Phase
- A Computational Approach to Evaluate Physical Requirements and Spatial Managements of Apartment Unit Floor Plans
- A Survey about the Volunteers in Dental Disabled Voluntary Organization
- Molecular analysis of p53, MDM2 and H-ras genes in low-grade central osteosarcoma
- Spinal Cord Infarction After Decompressive Laminectomy for Spontaneous Spinal Epidural Hematoma : Case Report
- Codoped Spacer Ratio Effect on Electroluminescence Characteristics of Hybrid White Organic Light-Emitting Diodes for Reduced Efficiency Roll-Off
- Cellulose Dimethylphenylcarbamate-bonded Carbon-clad Zirconia for Chiral Separation in High Performance Liquid Chromatography
- Dipolarity, Hydrogen-Bond Basicity and Hydrogen-Bond Acidity of Aqueous Poly(ethylene glycol)Solutions
- Effect of an Atmospheric Pressure Plasma Cleaning on the Outgassing Characteristics of MgO Layer for Plasma Display Panel
- B106 EFFECT OF COAL TYPE ON GASIFICATION IN PRESSURIZED DROP TUBE FURNACE(Droplet/particle combustion-1)
- Alternative Splicing of Type II Procollagen Gene in the Dedifferentiation of Rat Epiphyseal Chondrocytes Serially Cultured in Monolayer
- Etching of Copper Films for Thin Film Transistor Liquid Crystal Display using Inductively Coupled Chlorine-Based Plasmas
- Preparation of BiFeO3 Thin Films on SrRuO3/SrTiO3(001) Substrate by Dual Ion Beam Sputtering
- Achievable Rate of Adaptive Wireless Multicast with Antenna Diversity in Nakagami Fading Channels
- Color Stability and High Efficiency of White Phosphorescent Organic Light-Emitting Diodes with Suitable Position of Phosphorescent Red Emitter
- Hybrid White Organic Light-Emitting Diodes with Reduced Efficiency Roll-Off
- Ratio Effect of Codoped Spacer on Electroluminescent Characteristics of Hybrid White Organic Light-Emitting Diodes
- Highly Efficient Deep-Blue Phosphorescent Organic Light-Emitting Diodes Using Iridium(III) Bis[(5-cyano-4-fluorophenyl)pyridinato-N,C2’]picolinate as an Emitter
- Efficiency Enhancement and Color Stabilization in Organic Light-Emitting Devices Utilizing a Fullerene–Polymer Composite Layer Acting as a Hole Transport Layer
- Effect of the Thickness of the Lithium Quinolate and Aluminum Mixed Layer Acting as an Electron Injection Layer on the Efficiency of Organic Light-Emitting Devices
- Comprehensive analysis of DNA repair gene polymorphisms and survival in patients with early stage non-small-cell lung cancer
- Gas Chromatographic Characterization of Silica-Based Reversed-Phase Sorbents for Solid Phase Extraction
- Multi-Podands. Ag(I) Complexation with Mono - to Quadru-Podands Having Sulfur Donor
- A Correlation between Antioxidant Activity and Metabolite Release during the Blanching of Chrysanthemum coronarium L.
- Inverse Dynamic Analysis of Constrained Multibody Systems Considering Friction Forces Acting on Kinematic Joints
- An Internal Variable Approach to Creep Behavior of Pure Magnesium Poly and Single Crystals
- Dual roles of a variable number of tandem repeat polymorphism in the TERT gene in lung cancer
- Plasma Characteristics of Large Area Inductively Coupled Plasma System Using Ferrite-Module-Enhanced U-Type Antenna
- Numerical Flow Analysis of Torque Converter Using Interrow Mixing Model
- WHEN IS A REGULAR RING A SEMISIMPLE ARTINIAN RING?
- Surgical treatment of tertiary hyperparathyroidism after renal transplantation : A 31-year experience in a single institution
- Correlation Between Circulating Angiogenic Cell Mobilizations and Recovery of Coronary Flow Reserve in Patients With Acute Myocardial Infarction
- Characteristics of Silicon Carbide Etching Using Magnetized Inductively Coupled Plasma
- Effect of Antenna Diameter on the Characteristics of Internal-Type Linear Inductively Coupled Plasma
- Treatment of lingual ulcers caused by tongue thrust with Hypoxic-Ischemic Encephalopathy
- Characteristics of Parallel Internal-Type Inductively Coupled Plasmas for Large Area Flat Panel Display Processing
- Correlation of genotypes for thiopurine methyltransferase and inosine triphosphate pyrophosphatase with long-term clinical outcomes in Korean patients with inflammatory bowel diseases during treatment with thiopurine drugs
- Characteristics of a Multilayer SiOx(CH)yNz Film Deposited by Low Temperature Plasma Enhanced Chemical Vapor Deposition Using Hexamethyldisilazane/Ar/N2O
- Deposition of SiO2 by Plasma Enhanced Chemical Vapor Deposition as the Diffusion Barrier to Polymer Substrates
- Study on the O2 Plasma Treatment of Indium Tin Oxide for Organic Light Emitting Diodes Using Inductively Coupled Plasma
- Characteristics of Plasma Using a Ferromagnetic Enhanced Inductively Coupled Plasma Source
- Characteristics of Inductively Coupled Plasma using Internal Double Comb-type Antenna for Flat Panel Display Processing
- Novel Internal Linear Inductively Coupled Plasma Source for Flat Panel Display Applications
- Characteristics of Large Area Inductively Coupled Plasma Using a Multiple Linear Antennas with U-Type Parallel Connection for Flat Panel Display Processing