Multi-Probe Atomic Force Microscopy Using Piezoelectric Cantilevers
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概要
- 論文の詳細を見る
We developed a multi-probe atomic force microscopy (AFM) system using piezoelectric thin film (PZT) cantilevers. The use of self-sensing cantilevers with integrated deflection sensors as probes markedly reduced complexity in the ordinary AFM setup. Address-patterned samples having microfabricated $x$–$y$ coordinate patterns, fabricated by electron beam lithography, were developed as well. These samples allow us to evaluate the relative distance between the probes by the comparison of the images obtained. Although the minimum distance between these probes was 126 μm using the original cantilevers, it was reduced to 9.2 μm by using the PZT cantilevers modified by a focused ion beam. Furthermore, we found that the interaction forces between the cantilevers were detected by determining the change in the amplitude of each cantilever.
- 2007-08-30
著者
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MIYATO Yuji
Department of Electronic Science and Engineering, Kyoto University
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WATANABE Shunji
Nikon Corporation
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FUJII Toru
Nikon Corporation
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Matsushige Kazumi
Department Of Applied Science Faculty Of Engineering Kyushu University
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Satoh Nobuo
Department Of Electronic Science And Engineering Kyoto University
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Tsunemi Eika
Department of Electronic Science and Engineering, Kyoto University, Kyoto 615-8510, Japan
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Yamada Hirofumi
Department of Electrical Science and Engineering, Kyoto University, Katsura, Nishikyo-ku, Kyoto 615-8510, Japan
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Watanabe Shunji
Nikon Corporation, Sagamihara, Kanagawa 228-0828, Japan
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Kobayashi Kei
Leading Project, Kyoto University, Kyoto 615-8510, Japan
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Fujii Toru
Nikon Corporation, Sagamihara, Kanagawa 228-0828, Japan
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