Multi-Probe Atomic Force Microscopy with Optical Beam Deflection Method
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概要
- 論文の詳細を見る
We developed a multi-probe atomic force microscope (AFM) having two AFM cantilevers independently controlled using the optical beam deflection method. We succeeded in simultaneously obtaining images with two independent probes by frequency modulation (FM) detection method. To evaluate the distance between the AFM tips of the cantilevers, we used a new the address-patterned sample, which was also developed for this study. The images obtained show that the distance between the probes was 2 μm. The development of the multi-probe AFM opens a wide variety of applications in the present nanoscience and engineering field.
- 2007-08-30
著者
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MIYATO Yuji
Department of Electronic Science and Engineering, Kyoto University
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Matsushige Kazumi
Department Of Applied Science Faculty Of Engineering Kyushu University
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Satoh Nobuo
Department Of Electronic Science And Engineering Kyoto University
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Tsunemi Eika
Department of Electronic Science and Engineering, Kyoto University, Kyoto 615-8510, Japan
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Yamada Hirofumi
Department of Electrical Science and Engineering, Kyoto University, Katsura, Nishikyo-ku, Kyoto 615-8510, Japan
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Kobayashi Kei
Leading Project, Kyoto University, Kyoto 615-8510, Japan
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