Nanoscale Investigation of Optical and Electrical Properties by Dynamic-Mode Atomic Force Microscopy Using a Piezoelectric Cantilever
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概要
- 論文の詳細を見る
We demonstrated a novel application of a microfabricated force-sensing cantilever with a lead zirconate titanate (PZT) thin film as an integrated deflection sensor for a dynamic-mode atomic force microscope (AFM) combined with a scanning near-field optical microscope (SNOM). This experimental setup was also applied to a Kelvin-probe force microscope (KFM) for the investigation of local electrical properties. A frequency modulation (FM) detection method was used for enhancing the detection sensitivity of electrostatic forces between a probe tip and a sample. Local optical properties of a PbTiO3 single crystal were investigated using the conductive PZT cantilever as an AFM/SNOM probe. Furthermore, studies on local optical and electrical properties of ferroelectric copolymer films were also presented.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2003-07-15
著者
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KOBAYASHI Kei
International Innovation Center, Kyoto University
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WATANABE Shunji
Nikon Corporation
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FUJII Toru
Nikon Corporation
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Matsushige Kazumi
Department Of Applied Science Faculty Of Engineering Kyushu University
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Satoh Nobuo
Department Of Electronic Science And Engineering Kyoto University
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Horiuchi Toshihisa
Department Of Applied Physics Faculty Of Engineering Kyushu University
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Horiuchi Toshihisa
Department of Electronic Science and Engineering, Kyoto University, Yoshida-Honmachi, Sakyo, Kyoto 606-8501, Japan
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Yamada Hirofumi
Department of Electrical Science and Engineering, Kyoto University, Katsura, Nishikyo-ku, Kyoto 615-8510, Japan
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Watanabe Shunji
Nikon Corporations, 1-10-1 Asamizodai, Sagamihara, Kanagawa 228-0828, Japan
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Kobayashi Kei
International Innovation Center, Kyoto University, Yoshida-Honmachi, Sakyo, Kyoto 606-8501, Japan
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Fujii Toru
Nikon Corporations, 1-10-1 Asamizodai, Sagamihara, Kanagawa 228-0828, Japan
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