Effect of Ferroelectric/Metal Interface Structure on Polarization Reversal
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概要
- 論文の詳細を見る
The ferroelectric behaviors of vinylidene fluoride (VDF) oligomer thin films deposited on various bottom electrode materials (i.e., Au, Pt, Al, Al2O3/Al, and Al2O3/Au) were investigated. The coercive electric fields and full width at half maximum (FWHM) of the switching current peak of VDF oligomer thin films on the Au and Pt bottom electrodes were respectively lower and narrower than those of Al. These results indicate that the native oxide layer Al2O3 on the Al electrode surface works as a linear capacitor on ferroelectric capacitors. However, ferroelectric capacitors using Au and Pt bottom electrodes have the tendency to easily break down with the sudden application of an electric field. Their polarization switching and fatigue lifetime are affected by electrode material and the ferroelectric/metal interface.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2008-02-25
著者
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KOBAYASHI Kei
International Innovation Center, Kyoto University
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Matsushige Kazumi
Department Of Applied Science Faculty Of Engineering Kyushu University
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Horie Satoshi
Department Of Chemical Science And Engineering Graduate School Of Engineering Kobe University
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Ishida Kenji
Department Of Chemical Science And Engineering Graduate School Of Engineering Kobe University
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Yamada Hirofumi
Department of Electrical Science and Engineering, Kyoto University, Katsura, Nishikyo-ku, Kyoto 615-8510, Japan
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Kuwajima Shuichiro
Nano-Medicine Merger Education Unit, Department of Microengineering, Kyoto University, Yoshida, Sakyo, Kyoto 606-8501, Japan
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Kobayashi Kei
International Innovation Center, Kyoto University, Katsura, Nishikyo, Kyoto 615-8520, Japan
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Ishida Kenji
Department of Applied Chemistry, Ibaraki University
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