Size Reduction of Tunable Micromachined Filters for Fast Wavelength Tuning
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概要
- 論文の詳細を見る
We present the design and fabrication of a micromachined GaAs/AlGaAs filter for fast wavelength tuning. The size reduction of tunable micromachined filters is carried out to increase the speed of wavelength tuning. We fabricated micromachined filters having a miniature filter structure with an air gap of 300 nm and a short cantilever of 45 μm length, and exhibiting a fast response time of below 2.5 μs.
- Japan Society of Applied Physicsの論文
- 2004-02-01
著者
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Koyama Fumio
Microsystem Research Center P&i Lab. Tokyo Institute Of Technology
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Arai Masakazu
Microsystem Research Center P&i Laboratory Tokyo Institute Of Technology
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Hino Tomoyuki
Microsystem Research Center P&i Laboratories Tokyo Institute Of Technology
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Janto Wiganes
Microsystem Research Center Precision And Intelligence Laboratory Tokyo Institute Of Technology
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Amano Takeru
Microsystem Research Center Precision & Intelligence Laboratory Tokyo Institute Of Technology
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Amano Takeru
Microsystem Research Center, P&I Laboratories, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama 226-8503, Japan
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Janto Wiganes
Microsystem Research Center, P&I Laboratories, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama 226-8503, Japan
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Arai Masakazu
Microsystem Research Center, P&I Laboratories, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama 226-8503, Japan
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Hino Tomoyuki
Microsystem Research Center, P&I Laboratories, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama 226-8503, Japan
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