Densely Integrated Multiple-Wavelength Vertical-Cavity Surface-Emitting Laser Array
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概要
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We demonstrated a densely integrated multiple-wavelength GaInAs/GaAs vertical-cavity surface-emitting laser (VCSEL) array using non planar metal-organic chemical vapor deposition (MOCVD). The fabricated 1-mm-long array consists of 20-channel VCSELs and the pitch between each channel is as small as 50 μm. The lasing wavelength of each channel was precisely designed based on the relationship between the lasing wavelength and the pattern width. The wavelength spacing is within 1 nm. All VCSELs exhibited single-mode operation, an output power of over 1.2 mW and a threshold current of $0.52\pm 0.1$ mA.
- 2003-05-15
著者
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Koyama Fumio
Microsystem Research Center P&i Lab. Tokyo Institute Of Technology
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Arai Masakazu
Microsystem Research Center P&i Laboratory Tokyo Institute Of Technology
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KONDO Takashi
Microsystem Research Center, Precision & Intelligence Laboratory, Tokyo Institute of Technology
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Onomura Akihiro
Microsystem Research Center P&i Laboratory Tokyo Institute Of Technology
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Matsutani Akihiro
Microsystem Research Center Precision And Intelligence Laboratory Tokyo Institute Of Technology
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Miyamoto Tomoyuki
Microsystem Research Center P&i Lab. Tokyo Institute Of Technology
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Onomura Akihiro
Microsystem Research Center, P&I Laboratory, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama 226-8503, Japan
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Miyamoto Tomoyuki
Microsystem Research Center, P&I Laboratory, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama 226-8503, Japan
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Arai Masakazu
Microsystem Research Center, P&I Laboratory, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama 226-8503, Japan
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Kondo Takashi
Microsystem Research Center, P&I Laboratory, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama 226-8503, Japan
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