431 シリコン材料の疲労特性に影響を及ぼす諸因子に関する研究(T09-2 微小機械システムにおけるマイクロ・ナノ力学(2) 単結晶シリコンの力学特性,大会テーマセッション,21世紀地球環境革命の機械工学:人・マイクロナノ・エネルギー・環境)

概要

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Static strength tests and dynamic fatigue tests were conducted on polycrystalline silicon thin films and bulk single crystalline silicon. Statistical analysis was performed to integrate all the test results on the basis of equivalent initial crack length. The fatigue crack extension was represented by Paris's law with two parameters and the cumulative fracture probability was formulated as a function of the applied stress and the number of fatigue cycles. The influence of specimen shape and process damage on fatigue characteristics of silicon materials was investigated by the analysis.
2008-08-02