1843 半導体材料の高サイクル疲労特性に関する研究(J09-1 マイクロ構造・材料の強度評価,J09 電子情報機器,電子デバイスの熱制御と強度・信頼性評価)

概要

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In order to elucidate basic fatigue characteristics of single crystal silicon, which is the most fundamental material composing Micro-Electromechanical Systems (MEMS), specimens and experimental setup are newly designed aiming at the capability for both high cycle fatigue loading at high frequencies up to 1kHz and fracture test with monotonic loading in just one system. A small piezoelectric external actuator is combined with a small-scale test structure which is fabricated by Laser Microjet machining. Excellent performance of the total system is confirmed by simulation of deformation, including self-alignment features between the actuator and the specimen.
一般社団法人日本機械学会の論文
2005-09-18