Tungsten Photochemical Vapor Deposition Mechanism in WF_6+H_2 System : I. Adspecies Excitation Model
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1986-05-20
著者
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Moriya Tadashi
Tokyo Metropolitan Univ.
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Moriya T
Institute Of Material Science University Of Tsukuba
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Moriya Tsuyoshi
Institute Of Material Science University Of Tsukuba
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TOYAMA Masaharu
Toshiba Research and Development Center
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ITO Hitoshi
Toshiba Research and Development Center
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MORIYA Takahiko
Toshiba Research and Development Center
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Mikado T
Electrotechnical Laboratory
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Toyama Masaharu
Toshiba Central Research Laboratory
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