Interface Characteristics of the Reactively Sputtered Al_2O_3-Si Structure
スポンサーリンク
概要
- 論文の詳細を見る
The interface characteristics of Al_2O_3-Si structures formed on silicon wafers by dcreactive-sputtering of aluminum in an oxygen ambient are evaluated. The presence of a dispersion of interface state time constants was found by measuring the parallel conductance of the MOS structures. An attempt is made to analyze the experimental results by using the tunneling model. We conclude that traps are distributed in the Al_2O_3 to a depth of 4.8Å from the interface with densities of the order of 10^<11>/eV・cm^2 or less. These densities were further reduced by hydrogen treatment. The electron capture cross section of the traps located at the interface is about 1.5×10^<-14>cm^2 and that for holes is smaller by about a factor of 10.
- 社団法人応用物理学会の論文
- 1969-06-05
著者
-
Tanaka Toshio
Department Of Electrical And Electronic Engineering Faculty Of Science And Technology Sophia Univers
-
Tanaka Toshio
Department Of Applied Physics Faculty Of Engineering Tokyo University
-
Iwauchi Shigeki
Department Of Electrical And Electronic Engineering Faculty Of Science And Technology Sophia Univers
-
Iwauchi Shigeki
Department Of Electrical And Electronic Engineering Faculty Of Science And Technology Sophia Univers
-
Tanaka Toshio
Department of Applied Chemistry, Faculty of Engineering, Osaka Univeristy
関連論文
- Elastic Stiffness Constants of Cadmium Sulfide
- Imatinib mesylate inhibited rat adjuvant arthritis and PDGF-dependent growth of synovial fibroblast via interference with the Akt signaling pathway
- Preventative Effect of a Flavonoid, Enzymatically Modified Isoquercitrin on Ocular Symptoms of Japanese Cedar Pollinosis
- Flavonoids and Related Compounds as Anti-Allergic Substances
- Vegetarian Diet Ameliorates Symptoms of Atopic Dermatitis through Reduction of the Number of Peripheral Eosinophils and of PGE2 Synthesis by Monocytes
- 紫斑病性腎炎の臨床病理学的検討
- Irreversible Deacylation of Plasma Membrane Phospholipids by the Combined Action of Mg^ and a Long-Chain Acyl-CoA Synthetase Inhibitor in Saccharomyces cerevisiae
- UK-2A, B, C and D, Novel Antifungal Antibiotics from Streptomyces sp. 517-02 IV. Comparative Studies of UK-2A with Antimycin A_3 on Cytotoxic Activity and Reactive Oxygen Species Generation in LLC-PK1 Cells
- Proteomics-based identification of α-enolase as a tumor antigen in non-small lung cancer
- P-502 Structure-Activity Relationship Studies on UK-2A, A Novel Antifungal Antibiotic from Streptomyces sp. 517-02
- P-368 Identification of Phoslactomycin E as a Metabolite Inducing Hyphal Morphological Abnormalities of Aspergillus fumigatus IFO 5840
- Involvement of Oxidative Stress Induction in Na^+ Toxicity and Its Relation to the Inhibition of a Ca^-Dependent but Calcineurin-Independent Mechanism in Saccharomyces cerevisiae(MICROBIAL PHYSIOLOGY AND BIOTECHNOLOGY)
- Biosynthesis of Poly-γ-Glutamic Acid in Plants : Transient Expression of Poly-γ-Glutamate Synthetase Complex in Tobacco Leaves(PLANT BIOTECHNOLOGY)
- Proposals for Wastewater Treatment by Applying Flocculating Activity of Cross-linked Poly-γ-Glutamic Acid(Environmental Biotechnology)
- Physicochemical Properties of Cross-linked Poly-γ-Glutamic Acid and Its Flocculating Activity against Kaolin Suspension (Environmental Biotechnology)
- Oxidative Stress-Dependent Inhibition of Yeast Cell Growth by Farnesylamine and Its Possible Relation to Amine Oxidase in the Mitochondrial Fraction(MICROBIAL PHYSIOLOGY AND BIOTECHNOLOGY)
- Synergistic Combination of Direct Plasma Membrane Damage and Oxidative Stress as a Cause of Antifungal Activity of Polyol Macrolide Antibiotic Niphimycin
- Depletion of Glutathione as a Cause of the Promotive Effects of Polygodial, a Sesquiterpene on the Production of Reactive Oxygen Species in Saccharomyces cerevisiae
- Synthesis of Uridine 5'-Monophosphate Glucose as an Inhibitor of UDP-Glucose Pyrophosphorylase
- Purification and Characterization of Poly(γ-glutamic acid) Hydrolase from a Filamentous Fungus, Myrothecium sp. TM-4222
- Screening for Microorganisms Having Poly(γ-glutamic acid) Endohydrolase Activity and the Enzyme Production by Myrothecium sp. TM-4222
- Bronchial and nasal responsiveness in atopic asthma and allergic rhinitis patients: Relationship of local responsiveness to cytokine production by peripheral blood monounclear cells
- P1-IS-87 Prevalence of virus DNAs in the sperm and urine of healthy men
- Analysis of cytokine-driven serum amyloid A expression based on the clinical results of IL-6 blocking therapy : a new cis-acting mechanism of STAT3
- Purification and Characterization of Tora-mame (Phaseolus vulgaris) Seed Calmodulin(Biological Chemistry)
- Minimal influence of tocilizumab on IFN-γ synthesis by tuberculosis antigens
- P-IS-6 Change of human papillomavirus type 16 DNA level in women with cytological abnormality(Oncology 2,Group 89,International Session)
- Quantification of human papillomavirus type 16 DNA in pregnant and non-pregnant women with or without cytological abnormality and cervical cancer(Oncology 7)
- A case of Mikulicz's disease with Th2-biased cytokine profile : possible feature discriminable from Sjogren's syndrome
- Purification and Characterization of Geranylgeranyl Diphosphate Synthase from Methanobacterium thermoformicicum SF-4
- Some Properties of F_-Reducing Hydrogenase of Methanobacterium thermoformicicum Strain SF-4
- Purification and Some Properties of Aspartate Aminotransferase of Methanobacterium thermoformicicum SF-4(Biological Chemistry)
- A Turbulent Cylindrical Wall Jet Equipped with a Front-Facing Step Impinging Normally on a Flat Plate
- F306 STUDY ON A TURBULENT CYLINDRICAL WALL JET FLOW : FLOW PROPERTIES ON A ROUGH WALL SURFACE(Near-wall turbulence and its control)
- 1-24.Quantification of human papillomavirus type 16 DNA in pregnant women(Session 2 Oncology 2)
- Minocycline-induced vasculitis fulfilling the criteria of polyarteritis nodosa
- -0533-INTRACELLULAR LOCALIZATION OF THE SUBCLASSES OF HUMAN CYCLIC AMP PHOSPHODIESTERASE : COMPARISON WITH HEART AND KIDNEY
- Pharmacogenomics of Cardiovascular Pharmacology : Pharmacogenomic Network of Cardiovascular Disease Models
- A NOVEL REGULATION MECHANISM OF Ca^ DEPENDENT MYOSIN LIGHT CHAIN PHOSPHORYLATION OF SMOOTH MUSCLE : Blood Vessels : FREE COMMUNICATIONS (I) : PROCEEDINGS OF THE 49th ANNUAL SCIENTIFIC MEETING OF THE JAPANESE CIRCULATION SOCIETY
- Renal Crisis Due to Intimal Hyperplasia in a Patient with Mixed Connective Tissue Disease (MCTD) Accompanied by Pulmonary Hypertension
- Oxidative Stress Induction as a Cause of Ba^〈2+〉-Dependent Fungicidal Action of UMP-Derivative on the Yeast Shizosaccharomyces pombe
- Facile Synthesis of Bromosubstituted Aromatic Ethers by Use of Tetraalkylammonium Polyhalides
- Effect of Steam Explosion Treatment on Enzymatic Hydrolysis of Palm Cake and Fiber as Solid Wastes and Natural Resources
- Studies on Cellular Response of Escherichia coli to UDP-Galactose Accumulation
- o-Aminodiphenyl-acetic Acid Test as a Spectrophotometric Method for Determination of Pentose Phosphate Esters(Biological Chemistry)
- Bulge Formation in Escherichia coli Induced by L-Arabinose under Hypertonic Conditions with Sodium Chloride
- Benzylic Bromination of Arenes by Use of Benzyltrimethylammonium Tribromide
- The 1/ f Noise MOS Transistors
- Effect of Heat Treatment on the Interface Characteristics in Reactively Sputtered Al_2O_3-Si Structures
- Effect of Radiation in Reactively Sputtered Al_2O_3-Si Structures
- Evaluation of Adenosine 5'-Hexadecylphosphate as an Inhibitor of Acyl-CoA Synthetase Isozyme Functional for Phospholipid Reconstitution in the Yeast Saccharomyces cerevisiae
- Al_2O_3-Silicon MOS Field Effect Transistors
- Solid-Solid Diffusion of Boron in Silicon Using Reactive Sputtering
- Conformational Analyses of n-Tetrasilane, 1,2-Dimethl-disilane, 1,2 -Disilylethane, n-Butane, and Related Molecules : Molecular Mechanics Study
- Existence of an Optically Heterogeneous Peptide Unit in Poly(γ-Glutamic Acid) Produced by Bacillus subtilis
- A Bacteriolytic Effect of UDP-Sugar Hydrolase on Escherichia coli via Its Overproduction Using a Modified ushA Gene Expression System
- Tocilizumab, a humanized anti-interleukin-6 receptor antibody, ameliorated clinical symptoms and MRI findings of a patient with ankylosing spondylitis
- Successful treatment of acquired hemophilia A, complicated by chronic GVHD, with tocilizumab
- Effects of Deuteron Bombardment on CdS Single Crystals
- The Effects of Traps in the Semiconductor on the Characteristics of MOS Transistors
- Characteristics of Silicon Silicon-Dioxide Structures Formed by DC Reactive Sputtering
- Interface Properties of Al_2O_3-Ge Structure and Characteristicsof Al_2O_3-Ge MOS Transistors
- 4 Pharmacogenomics and Pharmacoinformatics(Symposium 5 (SY5) (IHD) : Genome Informatics of Cardiovascular System)(Special Program)
- Improved Production of Isoamyl Acetate by a Sake Yeast Mutant Resistant to an Isoprenoid Analog and Its Dependence on Alcohol Acetyltransferase Activity, but Not on Isoamyl Alcohol Production (Brewing and Food Technology)
- Infrared Absorption of Free Carriers in Ionic Crystals
- Measurement of Piezoelectric Constants of a CdS Crystal
- Infrared Absorption of Electrons Through Piezoelectric Scattering
- DNA Chip Technology and Pharmacogenomic Cardiovascular Medicine
- Effects of Interface States on the Characteristics of MOS Transistors
- Interface Characteristics of the Reactively Sputtered Al_2O_3-Si Structure
- Synergistic fungicidal activities of polymyxin B and ionophores, and their dependence on direct disruptive action of polymyxin B on fungal vacuole
- A case of Behcet's disease treated with a humanized anti-interleukin-6 receptor antibody, tocilizumab
- Antimycin A-induced cell death depends on AIF translocation through NO production and PARP activation and is not involved in ROS generation, cytochrome c release and caspase-3 activation in HL-60 cells
- Enhancement effect of N-methyl-N"-dodecylguanidine on the vacuole-targeting fungicidal activity of amphotericin B against the pathogenic fungus Candida albicans
- The vacuole-targeting fungicidal activity of amphotericin B against the pathogenic fungus Candida albicans and its enhancement by allicin
- Dependence of vacuole disruption and independence of potassium ion efflux in fungicidal activity induced by combination of amphotericin B and allicin against Saccharomyces cerevisiae
- Effect of beta-adrenergic blockade on plasma dopamine-beta-hydroxylase activity and triiodothyronine in hyperthyroidism.
- Shift of the Gate Threshold Voltage of MOS Transistors dne to the Introduction of Shallow Impurities
- Combined pH-impedance monitoring and high-resolution manometry of Japanese patients treated with proton-pump inhibitors for persistent symptoms of non-erosive reflux disease
- Tetracyanoethylene Complexes of Ni(0) and Co(−1) Containing Isocyanides and Nitrosyl
- Synthesis of β-1, 4-Glucan by the β-Transglucosylase of Sclerotinia libertiana
- Preparation and electrical conductivity of some simple and complex salts formed between N,N-dialkyl-1,3-dichalcogenacycloalkan-2-iminium and TCNQ .
- Synthesis and electrical properties of TCNQ radical anion salts with N,N'-ethylenedi(1,3-dithiolan-2-iminium) dication and related dications.
- Tocilizumab for the Treatment of Patients With Refractory Takayasu Arteritis
- Preparation and Reaction of Some Di-tert-butylnitroxidopalladium(II) Complexes, PdX(But2NO)L (L=PPh3, AsPh3, P(OPh)3; X=C1, Br, I)
- Palladium(II) complexes of 2,2,6,6-tetramethylpiperidine N-oxyl radical.
- Inter- and intramolecular rhodium-rhodium interactions in bis(bidentate isocyanide)rhodium(I) hexafluorophosphates.
- Redox reactions of cis-dialkylcobalt(III) complexes with benzyl and allyl bromides, induced by thermal cleavage of the cobalt-carbon bond.
- Efficient reduction of triphenylmethanol to triphenylmethane by 9,10-dihydro-10-methylacridine in the presence of perchloric acid.
- Synthesis and Proton Magnetic Resonance Spectra of Some Dichloro(picolinaldimine)palladium(II) and -platinum(II) Complexes
- Cellotriose Synthesis Using D-Glucose as a Starting Material by Two Step Reactions of Immobilized β-Glucosidases
- Interaction of the β-Transglycosylase of Trichoderma longibrachiatum with Cellulose
- Structure of Water-insoluble Glucan Synthesized by β-Transglycosylase of Trichoderma longibrachiatum
- Halogenotriphenyltin(IV) adducts of tetrakis(t-butyl isocyanide)-rhodium(I) perchlorate. Preparation and kinetics.
- Barrier to internal rotation around the isopropyl-nitrogen bond of some N,N-diisopropyl-1,3-dithia- and 1,3-diselenacycloalkan-2-iminium salts, [X(CH2)nXCN(i-Pr)2]+Y- (X=S, Se; Y=Br, PF6; n=2,3).
- The Reactions of Dihalogenoalkanes with Dimethyltin Bis-(N,N-dimethyldithiocarbamate) and Related Compounds
- Reactions of Dibromoalkanes with Dimethyltin Bis(N,N-dimethylthioseleno and diselenocarbamates) and Related Compounds
- Cyclic voltammetry of Rh(I) complexes and the oligomers. A correlation between the anodic peak potentials and the rate constants for the electron transfer reactions with inorganic oxidants.
- Electron transfer from tetrakis(isocyanide)rhodium(I) monomers, and the oligomers to iron(III) and cobalt(III) complexes. Enhancement of the reactivity by the oligomerization.
- Electron coupled proton transport mediated by [Fe4S4(SC6H4-p-n-C8H17)4]2- in liquid membrane.