Diffusion of Defects in Low Temperature Ion Implanted GaAs
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1971-08-05
著者
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AOKI Kazunori
Department of Electrical Engineering, Faculty of Engineering Science, Osaka University
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Masuda Kohzoh
Material Science Tsukuba University
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Aoki Kazunori
Department Of Electrical Engineering Faculty Of Engineering Science Osaka University
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Aoki Kazunori
Department Of Electrical And Electronic Engineering Faculty Of Engineering Kobe University
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Gamo Kenji
Department Of Electrical Engineering Faculty Of Engineering Science Osaka University
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Masuda Kohzoh
Department Of Electric Engineering Faculty Of Engineering Science Osaka University
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Namba S
Faculty Of Engineering Science Osaka University
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Namba Susumu
Department Of Electrical Engineering Faculty Of Engineering Science Osaka University
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Namba S
Riken The Institute Of Physical And Chemical Research
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