Enhanced Diffusion of Ion Implanted Sb in Silicon
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1970-03-05
著者
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Masuda Kohzoh
Material Science Tsukuba University
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Gamo Kenji
Department Of Electrical Engineering Faculty Of Engineering Science Osaka University
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Masuda Kohzoh
Department Of Electric Engineering Faculty Of Engineering Science Osaka University
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ISHIHARA Shinji
Research Reactor Institute, Kyoto University
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Namba S
Faculty Of Engineering Science Osaka University
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Kimura Itsuro
Research Reactor Institute Kyoto University
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Doi Atsutoshi
Department Of Electrical Engineering Faculty Of Engineering Science Osaka University
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Namba Susumu
Department Of Electrical Engineering Faculty Of Engineering Science Osaka University
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Ishihara Shinji
Research Reactor Institute Kyoto University
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Namba S
Riken The Institute Of Physical And Chemical Research
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Ishihara Shinji
Research Teactor Institute Kyoto University
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