高周波スパッタリングによるMgO薄膜の配向性と微細構造(<特集>セラミックスの微細構造)
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概要
- 論文の詳細を見る
- 社団法人日本セラミックス協会の論文
- 1986-08-01
著者
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山下 努
長岡技術科学大学工学部
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鎌田 喜一郎
長岡技術科学大学工学部
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細野 洋司
長岡技術科学大学工学部
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Tanaka O
Institute Of Pharmaceutical Sciences Faculty Of Medicine Hiroshima University
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鎌田 喜一郎
長岡技術科学大学化学系
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Tanaka O
Institute Of Pharmaceutical Sciences Hiroshima University School Of Medicine
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山下 努
長岡技術科学大学
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鎌田 喜一郎
長岡技術科大学工学部
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