ECRプラズマCVD法による硬質炭素膜の合成 (超薄膜--その機能と制御<特集>)
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概要
著者
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Tanaka O
Institute Of Pharmaceutical Sciences Faculty Of Medicine Hiroshima University
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鎌田 喜一郎
長岡技術科学大学化学系
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Tanaka O
Institute Of Pharmaceutical Sciences Hiroshima University School Of Medicine
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