Preparation and Characterization of Epitaxial BaTiO_3 Thin Films by Low Frequency Sputtering
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概要
- 論文の詳細を見る
Ferroelectric barium titanate (BaTiO_3) thin films were deposited on undoped and Nb doped SrTiO_3 (100) substrates by simply designed method of low frequency and low cost sputtering apparatus. The film structures were evaluated using X-ray diffraction (XRD). The θ-2θ diffraction indicated that BaTiO_3 thin films were highly oriented in the (001) orientation. In addition, it was showed by φ-scan diffraction that BaTiO_3 thin films were grown epitaxially on the SrTiO_3 (100) substrate. The surface morphologies of BaTiO_3 thin films were observed by a scanning electron microscope (SEM) and that the surface of the films were smooth. Furthermore, P-E characteristics showed typical hysteresis loop inherent in ferroelectric materials. It was found that the ferroelectric thin films could be prepared by this low cost and unique low frequency sputtering as like as an usual rf sputtering method.
- 東海大学の論文
著者
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IIDA Masamori
Department of Information and Network, Tokai University Junior College
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KUROSU Tateki
Department of Electronics, School of Information Technology and Electronics, Tokai University
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KIMURA Hideki
Department of Electronics, School of Information Technology and Electronics, Tokai University
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Kurosu T
Department Of Electronics School Of Information Technology And Electronics Tokai University
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Kimura H
Department Of Electronics School Of Information Technology And Electronics Tokai University
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Kano Taikan
Course Of Electronics
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Kimura H
Institute For Materials Research Tohoku University
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Kimura Hideki
Department Of Electronics
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Kurosu Tateki
Department Of Electronics Faculty Of Engineering Tokai University
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Iida M
Department Of Information And Network Tokai University Junior College
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Iida Masamori
Department Of Electrical Engineering School Of Science And Engineering Waseda University
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TAKEMURA Takashi
Course of Electronics
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TAKEBUCHI Masataka
Toshiba Co., Ltd.
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Kimura Hideki
Department Of Clinical Laboratory Medicine And Nephrology Faculty Of Medicine Fukui Medical Universi
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Kimura Hideki
Department Of Chemistry And Biotechnology Graduate School Of Engineering The University Of Tokyo
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Takebuchi Masataka
Toshiba Co. Ltd.
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