Formation Mechanism of Surface Conductive Layer on Diamond Films : Comparison between Polycrystalline and Homoepitaxial Films
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概要
- 論文の詳細を見る
The electrical conduction process in the p-type surface conductive layer on homoepitaxial diamond films was investigated by two-probe method. Diamond films were homoepitaxially deposited on Ib diamond (100) and (111) substrate by hot-filament CVD without impurity doping. The experimental results show that there is near insulated layer on homoepitaxial diamond films just after the deposition of diamond films and the p-type surface conductive layer may be formed by the contact with acid contained in water vapor in air as the case of polycrystalline diamond films. Furthermore, the dependence of electrical resistance at the surface of diamond films on the crystal orientation was shown by examining the electrical properties of polycrystalline, (100) and (111) homoepitaxial films surfaces.
- 東海大学の論文
著者
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IIDA Masamori
Department of Information and Network, Tokai University Junior College
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KUROSU Tateki
Department of Electronics, School of Information Technology and Electronics, Tokai University
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AKIBA Yukio
Department of Electronics, Faculty of Engineering, Tokai University
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Kurosu T
Department Of Electronics School Of Information Technology And Electronics Tokai University
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Ri Sung
Department Of Electronics School Of Engineering Tokai University
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Akiba Yukio
Department Of Electronics School Of Engineering
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Akiba Yukio
Science Of Biological Function Life Science Graduate School Of Agricultural Science Tohoku Universit
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Kurosu Tateki
Department Of Electronics Faculty Of Engineering Tokai University
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Iida M
Department Of Information And Network Tokai University Junior College
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Iida Masamori
Department Of Electrical Engineering School Of Science And Engineering Waseda University
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RI Sung
Course of Electronics, Graduate School of Engineering
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Akiba Yukio
Department Of Animal Nutrition Graduate School Of Agricultural Science Tohoku University
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Ri Sung-gi
Department Of Electronics School Of Engineering Tokai University
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KUROSU Tateki
Department of Electronics
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