The Crystallinity of Diamond Thin Films Fabricated with Water Mixed Carbon Solution
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概要
- 論文の詳細を見る
CVD (Chemical Vapor Deposition) diamond thin films have been fabricated with water mixed carbon solution. Undoped and Boron doped diamond thin films were deposited on p-type Silicon and single crystal diamond (type Ib) substrate by hot-filament CVD method. It was confirmed that the resistance of diamond films, which were deposited with intentional water including carbon solution, was higher than that of as-grown diamond without intentional water. From the measurement of Seebeck effect, p type conduction did not be obtained in such diamonds. The crystallinity of water added diamond thin films were evaluated by using Raman spectroscopy, XPS (X-Ray Photoelectron Spectroscopy) and SIMS (Secondary lon Mass Spectrometry). From these results, it was found that the intentionally mixed water acted as an effect for good quality to undoped diamond thin films.
- 東海大学の論文
著者
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IIDA Masamori
Department of Information and Network, Tokai University Junior College
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KUROSU Tateki
Department of Electronics, School of Information Technology and Electronics, Tokai University
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KIMURA Hideki
Department of Electronics, School of Information Technology and Electronics, Tokai University
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Kurosu T
Department Of Electronics School Of Information Technology And Electronics Tokai University
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Kimura H
Department Of Electronics School Of Information Technology And Electronics Tokai University
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Kimura H
Institute For Materials Research Tohoku University
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Kurosu Tateki
Department Of Electronics Faculty Of Engineering Tokai University
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Iida M
Department Of Information And Network Tokai University Junior College
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Iida Masamori
Department Of Electrical Engineering School Of Science And Engineering Waseda University
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NUKAGA Eiji
Department of Electronics
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Kimura Hideki
Department Of Clinical Laboratory Medicine And Nephrology Faculty Of Medicine Fukui Medical Universi
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Kimura Hideki
Department Of Chemistry And Biotechnology Graduate School Of Engineering The University Of Tokyo
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KUROSU Tateki
Department of Electronics
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