Electrodeposition of Diamond-like Carbon Films on Silicon Substrates Using N,N-Dimethylformamid
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概要
- 論文の詳細を見る
Diamond-like carbon (DLC) films were synthesized by an electrodeposition technique on silicon (Si) substrates using liquid N,N-dimethylformamid (DMF). The electrodeposition was performed in the temperature range from 40 to 80°C and the applied voltage range from $-1$ kV to $-5$ kV. The structures of the films were characterized by Raman spectroscopy. The films with the electrical resistivity of about $10^{10}$ $\Omega$$\cdot$cm can be deposited using the liquid DMF under the liquid temperature of 80°C and the applied voltage of $-2$ kV. Moreover, the current density has an important role in the deposition of the films.
- Japan Society of Applied Physicsの論文
- 2004-09-15
著者
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Choe Il
Department Of Information And Network Tokai University Junior College
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Okada Takumi
Department Of Information And Network Tokai University Junior College
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Kurosu Tateki
Department Of Electronics Faculty Of Engineering Tokai University
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Iida Masamori
Department Of Electrical Engineering School Of Science And Engineering Waseda University
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Yasumori Yoshio
Department Of Electronics School Of Engineering Tokai University
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Kimura Hideki
Department Of Chemistry And Biotechnology Graduate School Of Engineering The University Of Tokyo
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Okada Takumi
Department of Information and Network, Tokai University Junior College, 2-3-23 Takanawa, Minato, Tokyo 108-8619, Japan
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Kimura Hideki
Department of Electronics, School of Information Technology and Electronics, Tokai University, 1117 Kitakaname, Hiratsuka, Kanagawa 259-1292, Japan
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Yasumori Yoshio
Department of Information and Network, Tokai University Junior College, 2-3-23 Takanawa, Minato, Tokyo 108-8619, Japan
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Choe Il
Department of Information and Network, Tokai University Junior College, 2-3-23 Takanawa, Minato, Tokyo 108-8619, Japan
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Iida Masamori
Department of Information and Network, Tokai University Junior College, 2-3-23 Takanawa, Minato, Tokyo 108-8619, Japan
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KUROSU Tateki
Department of Electronics
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