Fabrication of Solid-State Triode Devices by Use of Diamond Thin Films
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概要
- 論文の詳細を見る
A solid-state triode device using the diamond thin film is fabricated. Undoped diamond thin film is deposited on p^+-type Si substrate by hot-filament CVD method. For the purpose of making grid within diamond film, Mo film is deposited on the diamond film which is selectively covered by patterned photoresist film using electron beam evaporation. After the formation of Mo grid, diamond film is further deposited on Mo grid. The structure of triode is composed of p^+-Si, Mo grid and Ag paste. Holes are emitted from p^+-Si and transit toward the counter electrode (Ag-paste). The voltage applied to Mo grid controls this hole current. It is confirmed from the electrical measurement that the anode current flowing through this triode can be controlled by the voltage applying to the grid.
- 東海大学の論文
著者
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IIDA Masamori
Department of Information and Network, Tokai University Junior College
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KUROSU Tateki
Department of Electronics, School of Information Technology and Electronics, Tokai University
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KIMURA Hideki
Department of Electronics, School of Information Technology and Electronics, Tokai University
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AKIBA Yukio
Department of Electronics, Faculty of Engineering, Tokai University
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Kurosu T
Department Of Electronics School Of Information Technology And Electronics Tokai University
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Kimura H
Department Of Electronics School Of Information Technology And Electronics Tokai University
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Kimura H
Institute For Materials Research Tohoku University
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Akiba Yukio
Department Of Electronics School Of Engineering
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Kurosu Tateki
Department Of Electronics Faculty Of Engineering Tokai University
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Iida M
Department Of Information And Network Tokai University Junior College
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Iida Masamori
Department Of Electrical Engineering School Of Science And Engineering Waseda University
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NUKAGA Eiji
Department of Electronics
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NUKAGA Eiji
Course of Electronics, Graduate School of Engineering
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Akiba Yukio
Department Of Animal Nutrition Graduate School Of Agricultural Science Tohoku University
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Kimura Hideki
Department Of Clinical Laboratory Medicine And Nephrology Faculty Of Medicine Fukui Medical Universi
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Kimura Hideki
Department Of Chemistry And Biotechnology Graduate School Of Engineering The University Of Tokyo
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KUROSU Tateki
Department of Electronics
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