Minimum Value of the Specific Contact Resistance of Si-Metal Contacts : The Origin and the Magnitude

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概要

• 論文の詳細を見る
• 2001-09-25

著者

• Sano N

  Univ. Tsukuba Ibaraki Jpn

• SANO Nobuyuki

  Institute of Applied Physics, University of Tsukuba

• NATORI Kenji

  Institute of Applied Physics, University of Tsukuba

• Sano Nobuyuki

  Institute Of Applied Physics University Of Tsukuba

• Shimizu Tomo

  Institute Of Applied Physics University Of Tsukuba

• Natori Kenji

  Institute Of Applied Physics University Of Tsukuba

• Sano Nobuyuki

  Institute Of Applied Physics The University Of Tsukuba

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