Surface Smoothing Mechanism of AIN Film by Initially Alternating Supply of Ammonia
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概要
- 論文の詳細を見る
- Japan Society of Applied Physicsの論文
- 2004-08-15
著者
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Fukumoto Tetsuya
Faculty Of Engineering The University Of Tokushima
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Sakai S
Tokushima Univ. Tokushima Jpn
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Nakamura Akihiro
Faculty of Engineering, Hiroshima University
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YAN Fawang
Satellite Venture Business Laboratory, The University of Tokushima
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TSUKIHARA Masashi
Faculty of Engineering, The University of Tokushima
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YADANI Takayuki
Faculty of Engineering, The University of Tokushima
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NAOI Yoshiki
Faculty of Engineering, The University of Tokushima
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SAKAI Shiro
Faculty of Engineering, The University of Tokushima
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