Preparation of (Ba,Sr)TiO3 Thick Film on ZrO2 Substrates by Inkjet Printing

概要

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The thick films were prepared by the inkjet method with ink containing BaTiO3 and SrTiO3 powders. The ink droplets from a piezoelectric-type inkjet head were observed. The velocity of ink droplets was increased with increasing applied voltage of the inkjet head. The dot and line patterns were formed by inkjet printing on a ZrO2 substrate with a Pt electrode. The lines printed on the substrate have 220 μm width. The thickness profiles were measured for the single dot and the $6.5\times 6.5$ mm2 square pattern. The thickness was uniform over the printed thick film. The thick films printed by the inkjet method were fired in the temperature range from 900 to 1200°C. The grain growth advanced with increasing firing temperature. Ba0.7Sr0.3TiO3 was identified by X-ray diffraction patterns at firing temperatures of 1100 and 1200°C. The dielectric constant and $\tan\delta$ of Ba0.7Sr0.3TiO3 thick films fired at 1200°C without DC bias voltage at 10 MHz were 350 and 11%, respectively. The dielectric constant decreased slightly with increasing frequency. The dielectric constant decreased with increasing DC bias voltage. It is expected that the inkjet method with ink containing several ceramic powders is applicable to the fabrication of thick film patterns.
Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
2006-02-15