Preparation of Ba(Ti,Zr)O3 Thick-Film Microactuators on Silicon Substrates by Screen Printing

概要

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BaTi0.975Zr0.025O3 thick-film microactuators were fabricated by combining screen printing and silicon micromachining. The electric properties of BaTi0.975Zr0.025O3 thick films with a small area on a Pt bottom electrode using silicon substrates prepared by screen printing were investigated. The thick films were fired in the temperature range from 1310 to 1370°C. The remanent polarization $P_{\text{r}}$ and coercive field $E_{\text{c}}$ were 6.2 μC/cm2 and 1.8 kV/cm at the firing temperature of 1350°C, respectively. The effective piezoelectric constant $d_{33}$ calculated from a unipolar signal curve was approximately 120 pm/V for the thick film fired at 1350°C. After measuring the electric properties of BaTi0.975Zr0.025O3 thick films, microactuators were fabricated by etching the substrates. The displacement of a microactuator that has a $0.3\times 0.3$ mm2 area membrane and is driven at 40 Vpp and 4 kHz was approximately 0.12 μm. This indicates the possibility of applying this microactuator in lead-free micropump or micromixer devices.
Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
2005-05-15