Phase Shift of a Coplanar Waveguide by Bias Voltage on Thick Lead Zirconate Titanate Film at Microwave Frequency
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概要
- 論文の詳細を見る
A coplanar waveguide was fabricated by depositing a 1-μm-thick Au film on a multilayer dielectric, consisting of a 2-μm-thick lead zirconate titanate (PZT) film over an Al2O3 substrate, through etching. Following this, the reflection constant, transmission constant, and phase variation were measured for this transmission line as bias voltage was varied from 30 to 50 V. As a result, it was confirmed that the phase variation becomes about 15° at a 50 V bias at a frequency of 10 GHz. We then confirmed the basic input-output characteristics of this type of structure in the microwave band. Finally, the relative permittivity of a PZT thick film as a coplanar waveguide was estimated using the measurement results of relative permittivity according to the split cavity resonator method, and phase variation under the condition in which a bias voltage was applied.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2008-09-25
著者
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Shibata Kouji
Department Of Gastroenterology Social Insurance Chukyo Hospital
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Iijima Takashi
Research Center For Hydrogen Industrial Use And Storage National Institute Of Advanced Industrial Sc
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Masuda Yoichiro
Professor Emeritus at Hachinohe Institute of Technology
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Shibata Kouji
Department of Electric Intelligence and Systems, Hachinohe Institute of Technology, 88-1 Aza-obiraki, Oaza-myo, Hachinohe, Aomori 031-8501, Japan
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Iijima Takashi
Research Institute of Instrumentation Frontier, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 5, Tsukuba, Ibaraki 305-8568, Japan
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