Preparation of BaTiO3 Thick Films by Inkjet Printing on Oxygen-Plasma-Modified Substrates

概要

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Thick film patterns were prepared by an inkjet method with water-based ink containing BaTiO3 powder. An ethyl cellulose layer was made over Pt electrodes, and oxygen plasma modification was performed. After this modification, patterns on substrates were printed in shape. The measurement of the contact angle of ink on the ethyl cellulose layer and the X-ray photoelectron spectroscopy of the ethyl cellulose layer were carried out. From the obtained results, wettability was determined to be improved by increasing the number of hydrophilic functional groups on the surface of ethyl cellulose layer. Surface observation using a scanning electron microscope was carried out on a modified ethyl cellulose layer. Surface roughness due to the etching effect of oxygen plasma was observed to increase with modification time. After firing at 1340 °C for 1 h, the BaTiO3 film thickness was approximately 30 μm. The electric properties of BaTiO3 films were examined. The dielectric constant and $\tan\delta$ were 2200 and 0.05 at 1 kHz, respectively. The remanent polarization and coercive field measured from a $P$–$E$ hysteresis curve were 3.1 μC/cm2 and 1.1 kV/cm, respectively. These results indicate that an inkjet printing method using a modified EC layer is applicable to the fabrication of thick films on substrates.
2006-09-30