Preparation of Ferroelectric Thick Film Actuator on Silicon Substrate by Screen-Printing
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概要
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Piezoelectric actuators were prepared on Si substrates that have membranes fabricated by the wet-etching process. Ferroelectric Pb[Zr_<0.2>Ti<0.3>(Mg_<1/3>Nb_<2/3>)_<0.3> (Zn_<1/3>Nb_<2/3>)_<0.1> (Mg_<1/2>W_<1/2>)_<0.1>]O_3 thick films with a thickness of 25μm, and Pt bottom electrodes and Ag top electrodes were all prepared by screen printing methods. The actuation properties were investigated for an actuator with the dimensions of 3 × 10mm^2. The influence of membrane's thickness was examined. The displacement of the center of the actuator with a 100-μm-thick membrane was 0.3μm at an applied voltage of 25V. An array of micro actuators with the dimensions of 0.15 × 5mm^2 were also successfully prepared by screen-printing.
- 社団法人応用物理学会の論文
- 2001-09-30
著者
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Adachi Masatoshi
Department Of Electronics And Informatics Faculty Of Enggineering Toyama Prefectural University
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Futakuchi Tomoaki
Toyama Industrial Techcnology Center
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YAMANO Hiroshi
Department of Electronics and Informatics, Faculty of Engineering, Toyama Prefectural University
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Adachi Masatoshi
Department Of Chemistry And Biotechnology Graduate School Of Engineering Tottori University
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