Improvement of Photocatalytic Efficiency of TiO2 Thin Films Prepared by Pulsed Laser Deposition
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概要
- 論文の詳細を見る
The photocatalytic efficiency of TiO2 thin films was improved by the deposition of clusters during pulsed laser deposition in an oxygen atmosphere. It was found that the oxygen pressure and the distance between the target and the substrate affected the number and size of clusters. The clusters deposited at the substrate temperature of 250°C and the oxygen pressure of 100–300 mTorr were anatase-type crystal. In the photocatalitic evaluation, the film deposition with anatase-type clusters showed a high efficiency.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2005-05-15
著者
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Inoue Narumi
Department Of Electrical And Elecronic Engineering National Defense Academy
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Fukami Yuko
Department Of Electrical And Electronic Engineering National Defense Academy
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Okoshi Masayuki
Department Of Electrical And Electronic Engineering National Defense Academy
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Yoshida Tatsuro
Department Of Biotechnology School Of Engineering Nagoya University
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Inoue Narumi
Department of Electrical and Electronic Engineering, National Defense Academy, 1-10-20 Hashirimizu, Yokosuka 239-8686, Japan
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Fukami Yuko
Department of Electrical and Electronic Engineering, National Defense Academy, 1-10-20 Hashirimizu, Yokosuka 239-8686, Japan
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