Fluorine-Doped SiO2 Films Made from Silicone and Polytetrafluoroethylene Using an F2 Laser
スポンサーリンク
概要
- 論文の詳細を見る
In the present paper, we propose a novel method which permits us to fabricate fluorine-doped silicon dioxide (F-doped SiO2) films on various substrates at room temperature. The films were selectively grown on a substrate by simultaneous 157-nm F2 laser illumination of a silicone rubber target, a polytetrafluoroethylene (PTFE) target, and the substrate. Fourier transform infrared spectroscopy (FT-IR) spectra and X-ray photoelectron spectroscopy (XPS) spectra showed that the films had a uniform fluorine concentration in the depth direction and no contaminants, such as carbon and hydrocarbon. The films were photochemically grown on the substrate in an atmosphere of gases evolved from silicone and PTFE by F2 laser illumination. The relative dielectric constant of the films was lower than that of the SiO2 films grown by F2 laser illumination without a PTFE target, namely, 3.6 at a laser fluence of 22 mJ/cm2. The F-doped SiO2 film formed at a higher a laser fluence had a lower refractive index and lower relative dielectric constant.
- 2004-04-15
著者
-
Inoue Narumi
Department Of Electrical And Elecronic Engineering National Defense Academy
-
Okoshi Masayuki
Department Of Electrical And Electronic Engineering National Defense Academy
-
Takao Hiromitsu
Department Of Electrical And Electronic Engineering National Defense Academy
関連論文
- Refractive Index Control of SiO_2 Films by Pulsed Laser Deposition with Silicone Targets
- Photochemical Modification of Silicone Films Using F_2 Laser for Selective Chemical Etching
- Pulsed Laser Deposition of Polymethylphenylsilane Films by Optical-Parametric-Amplified Femtosecond Laser Pulses
- Pulsed Laser Deposition of Corrosion-Resistant Iron Thin Films
- An Analysis of EBIC Response of ITO/poly-Si Solar Cells : I-1: POLYCRISTALLINE SILICON SOLAR CELLS
- A New Pulsed Laser Deposition Method Using an Aperture Plate
- Annealing of Excimer-Laser-Ablated BaTiO_3 Thin Films
- Deposition of BaTiO_3 Thin Films by ArF Excimer Laser Ablation
- Thin Film Deposition of Photoluminescent Silicone Rubber by Pulsed Laser Deposition
- Photocatalytic TiO_2 Fine Particle Films Fabricated by Pulsed Laser Deposition