1J1-3 水熱合成法によるKNbO_3エピタキシャル膜の作製と特性評価(超音波物性・材料・フォノン物理)

概要

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High quality epitaxial KNbO_3 films were successfully grown on (100)SrRuO_3//(100)SrTiO_3 substrates by hydrothermal method. The KNbO_3 or KNbO_3-based materials are one of the promising lead-free piezoelectric materials as an environmental friendly material; however, the main interest in the KNbO_3-based piezoelectric materials have limited on bulk ceramics materials owing to the difficulty in thin or thick films preparation. Therefore the hydrothermal method has utilized for the growth of KNbO_3 films. Because, hydrothermal method has number of advantages for fabrication method of ultrasonic transducers; low deposition temperature, good conformability, high-purity deposition on a substrate. In this study, epitaxial SrRuO_3 film was used as bottom electrodes, which were grown on (100) SrTiO_3 substrate by sputter method. KNbO_3 films were prepared on (100) SrRrO_3//SrTiO_3 substrates at 210 ℃ by hydrothermal method. The KNbO_3 films were 7.5 μm thicknesses, and the K/Nb ratio measured by EDS was 50/50. The piezoelectric performance and material constants of the prepared KNbO_3 thick film were measured.
超音波エレクトロニクスの基礎と応用に関するシンポジウム運営委員会の論文
2008-11-11