316 光回折を用いたマイクロ工具オンマシン計測ユニットの試作 : 計測ユニットの基本特性(OS-10 加工計測・評価)

概要

論文の詳細を見る
According to advanced functionality in a wide variety of equipments in these days, ultra precision, high complexity and high efficiency of fine-fabrication is required. Not only performance of machine tool but also downsizing of high accurate working tool itself has been an important issue to realize above conditions. In this study, on-machine tool measurement technology using laser diffraction which is able to manage micro tool and able to post in the machine tool has been establishing. In this article, the on-machine tool measurement device is developed. The developed on-machine device is carried out a response measurement experiment of hundreds nano-displacement using piezo stage then the fundamental characteristics of the developed measurement device is verified.
一般社団法人日本機械学会の論文
2006-11-24