315 レーザトラップを用いたナノ3次元位置検出プローブに関する研究 : 2次元振動プローブの特性評価(OS-10 加工計測・評価)

概要

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As probing technique for Nano-CMM to measure microparts at the accuracy of nano order, the study on laser trapping probe has been progressed. In this report, we proposed circular motion probe and experimentally investigated the property of probe to enable coordinate measuring in all over oscillating plane. As the result, we proved that we can detect position of workpiece at the resolution of 30nm by monitoring oscillating amplitude. In addition, we were able to detect proximity angle between probe sphere and detected plane by monitoring change of orbit of circular motion. It is suggested that nano-position sensing in lateral 2D plane is possible with these properties of circular motion probe.
一般社団法人日本機械学会の論文
2006-11-24