C34 ナノ振動型レーザトラップにおけるプローブ周囲流体解析シミュレータの構築(OS-5 加工計測・評価)

概要

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In order to measure the 3D shape of microcomponents, a novel nano-CMM system has been developed based on an oscillated probing technique, which uses an optically trapped particle. The trapped particle is laterally oscillated at the focal plane of the objective. The frequency response of the oscillated particle disagrees with the theoretical curve of the spring-mass-damper model at high frequency range. It is considered the difference is caused from the numerical error for the fluid effect, which is given by the stokes formula 6rir. In this report, we construct a fluid simulation using SMAC method that calculates fluid resistance against an oscillating sphere in noninertial frame of reference. The fluid effect is investigated in order to improve the model of the sphere motion.
2008-11-21