ナノ振動型レーザトラップにおけるプローブ周囲流体解析シミュレータの構築(<小特集>生産加工・工作機械の規範2008)

概要

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In order to measure the 3D shape of microcomponents, a novel nano-CMM system has been developed based on an oscillated probing technique, which uses an optically trapped particle. The trapped particle is laterally oscillated at the focal plane of the objective. The frequency response of the oscillated particle typically agrees with the spring-mass-damper model. However the response disagrees with the theoretical curve of the conventional model equation in the range of high frequency. It is considered the difference between experiments and the model equation is caused from the numerical error for the fluid effect, which is applied on condition of creeping flow past a sphere. In this report, we construct a fluid simulation using SMAC method that calculates fluid resistance against an oscillating sphere in noninertial frame of reference. The fluid resistance damp the motion of an oscillating sphere pulled toward focal spot and spring-mass-damper system can be processed with the use of simulation.
2009-09-25