液晶マスクを用いた非積層マイクロ光造形法に関する研究(第1報) : 濃淡画像による非積層造形

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This paper presents a new method for fabricating micro structure by applying the stereolithography. This process is characterized by the mask exposure method and the nonlaminate 3-D constructing process for fabricating 3-D object precisely. The exposing method of stereolithography is roughly classified into two categories. One is a laser scanning method, the other is a mask method. The mask mpthod is more suitable for small size parts fabrication than the laser scanning method. However, precise adjustment of many masks is difficult for manufacturing 3-D structures. In this paper, a new stereolithography process for micro manufacturing is proposed, namely stereolithography using liquid crystal display (LCD) mask. Fundamental experiments were performed to verify the proposed method. Both a micro gear with a tooth width of about 80μm and pyramidal shape 1.5 mm in height can be fabricated in a few seconds without laminatipn. This method enables precise fabrication of various microstructures at high speed as compared with conventional techniques.
2001-04-05