リングビームを用いた三次元変位測定法(第1報) : 理論解析と基礎実験

概要

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For three dimensional positioning of a complex three dimensional mechanism flexibly, it is needs to measure three dimensional displacement of an end-effecter of the mechanism in the high precision by non-contact method. It was common to put the plural sensor or scale together and to measure the three dimensional displacement of the mechanism. However, it is difficult to calibrate positions and sensitivities of the plural sensor or scale. Therefore, the novel three dimensional displacement measuring method is proposed using the optics that focus is collected in the center of the spherical target which has been used for the radius measurement of the ball. Instead of high sensitivity on measuring in the XY direction, new ideas are necessary for the measurement in the Z direction in this optics. Therefore, a ring beam is used instead of the simple ray for Z direction measurement. The theoretical examination and simulation of the three dimensional displacement measurement using the ring beam are done and that validity is confirmed by the series of the experiments.
社団法人精密工学会の論文
2003-12-05